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Self-Sensing Micro- and Nanocantilevers with Attonewton-Scale Force Resolution

Arlett, J. L. and Maloney, J. R. and Gudlewski, B. and Muluneh, M. and Roukes, M. L. (2006) Self-Sensing Micro- and Nanocantilevers with Attonewton-Scale Force Resolution. Nano Letters, 6 (5). pp. 1000-1006. ISSN 1530-6984. https://resolver.caltech.edu/CaltechAUTHORS:20170803-093630839

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Abstract

Thin, piezoresistive silicon cantilevers are shown to provide unprecedented sensitivity for force detection in an integrated, self-sensing, readily scalable configuration. The devices realized herein are patterned from single-crystal Si epilayer membranes utilizing bulk micro- and nanomachining processes. We demonstrate an electrically transduced force sensitivity of 235 aN/Hz^(1/2) at room temperature and 17 aN/Hz^(1/2) at 10 K. Enhancement of the p+ piezoresistive gauge factor is observed at cryogenic temperatures. The results are employed to elucidate the ultimate, low-temperature sensitivity attainable from self-sensing nanoelectromechanical systems utilizing displacement transduction based upon semiconducting piezoresistors.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1021/nl060275yDOIArticle
http://pubs.acs.org/doi/abs/10.1021/nl060275yPublisherArticle
ORCID:
AuthorORCID
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2006 American Chemical Society. Received 6 February 2006. Published online 18 April 2006. Published in print 1 May 2006. We gratefully acknowledge support for this work from DARPA/MTO through SPAWAR Grant Number N66001-02-1-8914 and from the NSF under ECS-0089061. J.R.M. acknowledges support from a NSF graduate research fellowship. We also thank Tronic's Microsystems S.A., particularly Drs. Peter Pfluger, Natacha Raphoz, Ariel Cao, and Christian Pisella, for a fruitful collaborative work on wafer-scale NEMS fabrication.
Funders:
Funding AgencyGrant Number
Office of Naval Research (ONR)N66001-02-1-8914
NSFECS-0089061
NSF Graduate Research FellowshipUNSPECIFIED
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Issue or Number:5
Record Number:CaltechAUTHORS:20170803-093630839
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20170803-093630839
Official Citation:Self-Sensing Micro- and Nanocantilevers with Attonewton-Scale Force Resolution J. L. Arlett, J. R. Maloney, B. Gudlewski, M. Muluneh, and M. L. Roukes Nano Letters 2006 6 (5), 1000-1006 DOI: 10.1021/nl060275y
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:79822
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:05 Aug 2017 21:17
Last Modified:03 Oct 2019 18:24

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