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Very High Frequency Silicon Nanowire Electromechanical Resonators

Feng, X. L. and He, Rongrui and Yang, Peidong and Roukes, M. L. (2007) Very High Frequency Silicon Nanowire Electromechanical Resonators. Nano Letters, 7 (7). pp. 1953-1959. ISSN 1530-6984. https://resolver.caltech.edu/CaltechAUTHORS:20170807-082813235

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Abstract

We demonstrate very high frequency (VHF) nanomechanical resonators based upon single-crystal silicon nanowires (SiNWs), which are prepared by the bottom-up chemical synthesis. Metallized SiNW resonators operating near 200 MHz are realized with quality factor Q ≈ 2000−2500. Pristine SiNWs, with fundamental resonances as high as 215 MHz, are measured using a VHF readout technique that is optimized for these high resistance devices. The pristine resonators provide the highest Q's, as high as Q ≈ 13 100 for an 80 MHz device. SiNWs excel at mass sensing; characterization of their mass responsivity and frequency stability demonstrates sensitivities approaching 10 zeptograms. These SiNW resonators offer significant potential for applications in resonant sensing, quantum electromechanical systems, and high frequency signal processing.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1021/nl0706695DOIArticle
http://pubs.acs.org/doi/abs/10.1021/nl0706695PublisherArticle
ORCID:
AuthorORCID
Yang, Peidong0000-0003-4799-1684
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2007 American Chemical Society. Received 22 March 2007. Published online 22 June 2007. Published in print 1 July 2007. We gratefully acknowledge support from the NSF under grant EECS 0425914 (NSF-NSEC), MARCO, and from DARPA/SPAWAR under grant N66001-02-1-8914. X.L. Feng thanks S. Stryker for help in engineering and fabrication of experimental apparatus, and B. Gudlewski for helpful discussions.
Funders:
Funding AgencyGrant Number
NSFEECS-0425914
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Microelectronics Advanced Research Corporation (MARCO)UNSPECIFIED
Office of Naval Research (ONR)N66001-02-1-8914
Issue or Number:7
Record Number:CaltechAUTHORS:20170807-082813235
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20170807-082813235
Official Citation:Very High Frequency Silicon Nanowire Electromechanical Resonators X. L. Feng, Rongrui He, Peidong Yang, and M. L. Roukes Nano Letters 2007 7 (7), 1953-1959 DOI: 10.1021/nl0706695
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:79836
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:07 Aug 2017 17:31
Last Modified:09 Mar 2020 13:19

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