Ng, Willie W. and Hong, Chi-Shain and Yariv, Amnon (1978) Holographic interference lithography for integrated optics. IEEE Transactions on Electron Devices, 25 (10). pp. 1193-1200. ISSN 0018-9383. doi:10.1109/T-ED.1978.19251. https://resolver.caltech.edu/CaltechAUTHORS:20170807-175352913
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Abstract
In this paper, some of our recent work in the use of holographic interference lithography and various material removal techniques to corrugate thin-film optical waveguides are reviewed. The specific applications of these periodic thin-film devices in the distributed feedback and distributed Bragg reflector semiconductor laser, and as output grating couplers, are described. Recent results in the use and fabrication of chirped and curved-line gratings are also summarized.
| Item Type: | Article | |||||||||
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| Additional Information: | © 1978 IEEE. Manuscript received February 29, 1978; revised June 15,1978. This work was supported by the Air Force Office of Scientific Research and the National Science Foundation. | |||||||||
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| Issue or Number: | 10 | |||||||||
| DOI: | 10.1109/T-ED.1978.19251 | |||||||||
| Record Number: | CaltechAUTHORS:20170807-175352913 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20170807-175352913 | |||||||||
| Official Citation: | Willie W. Ng, Chi-Shain Hong and A. Yariv, "Holographic interference lithography for integrated optics," in IEEE Transactions on Electron Devices, vol. 25, no. 10, pp. 1193-1200, Oct 1978. doi: 10.1109/T-ED.1978.19251 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 79898 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | INVALID USER | |||||||||
| Deposited On: | 08 Aug 2017 02:52 | |||||||||
| Last Modified: | 15 Nov 2021 17:51 |
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