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Improved design of low-pressure fluidic microvalves

Pandolfi, Anna and Ortiz, Michael (2007) Improved design of low-pressure fluidic microvalves. Journal of Micromechanics and Microengineering, 17 (8). pp. 1487-1493. ISSN 0960-1317. doi:10.1088/0960-1317/17/8/010.

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Multilayer soft lithography (MSL) is used to fabricate monolithic elastomeric on-off microvalves by adopting a two-layer cross-channel architecture. The performance of microvalves is strongly dependent on the two-channel geometry (width, height and shape) and on the thickness of the interlayer membrane. Using a finite element model previously validated against experiments, we propose a new fluidic microvalve design, based on the concept of chemically swelling the thin interlayer membrane so as to induce two stable equilibrium configurations. The complete closure of the new valve may then be achieved by applying a much reduced actuation pressure, down to 1/4 of the pressure needed by the standard monostable design. The maximum stress in the interlayer membrane of the bistable valve also drops to 1/3 of the value corresponding to the standard design.

Item Type:Article
Related URLs:
URLURL TypeDescription
Pandolfi, Anna0000-0002-7084-7456
Ortiz, Michael0000-0001-5877-4824
Additional Information:© Institute of Physics and IOP Publishing Limited 2007. Received 20 March 2007, in final form 5 June 2007. Published 29 June 2007. Print publication: Issue 8 (August 2007). AP acknowledges the support of the Italian MIUR PRIN-2005 programme, protocol no. 2005085973.
Funding AgencyGrant Number
Ministero dell'Istruzione, dell'Universita e della Ricerca (MIUR)2005085973
Issue or Number:8
Record Number:CaltechAUTHORS:PANjmm07
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:8062
Deposited By: Archive Administrator
Deposited On:17 Jul 2007
Last Modified:08 Nov 2021 20:47

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