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Highly metastable amorphous or near-amorphous ternary films (mictamict alloys)

Nicolet, M.-A. and Giauque, P. H. (2001) Highly metastable amorphous or near-amorphous ternary films (mictamict alloys). Microelectronic Engineering, 55 (1-4). pp. 357-367. ISSN 0167-9317. https://resolver.caltech.edu/CaltechAUTHORS:20170822-160710299

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Abstract

Thin ternary films of the generic composition (early transition metal)–Si–(nitrogen or oxygen) can be synthesized that have an amorphous or near-amorphous structure and are highly resistant to crystallization upon thermal annealing. Common to all of them is the existence of two compounds that form a quasi-binary system. Some known properties of these films are reviewed. Their similarity with amorphous binary metallic alloys is emphasized. Many ternary systems should exist with which such amorphous films can be made. The name ‘mictamict’ is proposed to identify this general class of materials.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1016/S0167-9317(00)00468-8DOIArticle
http://www.sciencedirect.com/science/article/pii/S0167931700004688PublisherArticle
Additional Information:© 2001 Elsevier Science B.V. Available online 28 February 2001. Recognition is due to Dr. Elzbieta Kolawa whose work has pioneered this subject and whose support allowed it to flourish. My thanks go to C. Bernard, INPG, A. Blatter, PX Tech SA, and O. Banakh, EPFL, for helpful information, advice, and contributions. I am indebted to J.-L. Perpillou, French editor of chronicles on classical Greek, for his suggestion how to name appropriately the class of alloys discussed here.
Subject Keywords:Amorphous films; High metastability; Mictamict alloys; Ternary films; Diffusion barriers
Issue or Number:1-4
Record Number:CaltechAUTHORS:20170822-160710299
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20170822-160710299
Official Citation:M.-A. Nicolet, P.H. Giauque, Highly metastable amorphous or near-amorphous ternary films (mictamict alloys), Microelectronic Engineering, Volume 55, Issues 1–4, March 2001, Pages 357-367, ISSN 0167-9317, https://doi.org/10.1016/S0167-9317(00)00468-8. (http://www.sciencedirect.com/science/article/pii/S0167931700004688)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:80712
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:23 Aug 2017 17:02
Last Modified:03 Oct 2019 18:34

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