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Optical detection of CH_3 during diamond chemical vapor deposition

Goodwin, David G. and Glumac, Nick G. and Corat, Evaldo J. (1994) Optical detection of CH_3 during diamond chemical vapor deposition. In: Laser Techniques for State-Selected and State-to-State Chemistry II. Proceedings of SPIE. No.2124. Society of Photo-Optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 292-298. ISBN 0-8194-1417-4. https://resolver.caltech.edu/CaltechAUTHORS:20170918-131655519

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Abstract

Measurements of CH_3 have been made using resonance-enhanced multiphoton ionization (REMPI) in two different diamond growth environments. Spatial profiles of methyl above the substrate have been measured in a filament- assisted reactor, which show that the CH_3 concentration is depleted near the substrate. The CH_3 concentration at the substrate shows an approximate Arrhenius dependence on substrate temperature below 1000 K, characterized by an activation energy of 4 kcal/mole. Methyl measurements were also made in 35 Torr hydrogen/oxygen flame into which methane is injected near the substrate. Radial profiles of methyl, acquired using REMPI, and of CH_4, acquired using sampling mass spectroscopy, are in good qualitative agreement with the results of numerical simulations.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1117/12.178103DOIArticle
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2124/1/Optical-detection-of-CH3-during-diamond-chemical-vapor-deposition/10.1117/12.178103.fullPublisherArticle
Additional Information:© 1994 Society of Photo-Optical Instrumentation Engineers (SPIE). 17 June 1994. This work has been supported, in part, by the National Science Foundation under Grant CTS-9057921 and by the 17. J. Warnatz, in Combustion Chemistry, edited by W. C. Office of Naval Research, under contract N00014-90-J-1386. Gardiner, Jr. (Springer-Verlag, New York, 1984), p. 197. An additional equipment grant from the AT&T Foundation is gratefully acknowledged.
Funders:
Funding AgencyGrant Number
NSFCTS-9057921
Office of Naval Research (ONR)N00014-90-J-1386
AT&T FoundationUNSPECIFIED
Series Name:Proceedings of SPIE
Issue or Number:2124
Record Number:CaltechAUTHORS:20170918-131655519
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20170918-131655519
Official Citation:David G. Goodwin, Nick G. Glumac, Evaldo J. Corat, "Optical detection of CH3 during diamond chemical vapor deposition", Proc. SPIE 2124, Laser Techniques for State-Selected and State-to-State Chemistry II, (17 June 1994) http://dx.doi.org/10.1117/12.178103
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:81529
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:19 Sep 2017 17:13
Last Modified:03 Oct 2019 18:43

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