Goodwin, David G. and Glumac, Nick G. and Corat, Evaldo J. (1994) Optical detection of CH_3 during diamond chemical vapor deposition. In: Laser Techniques for State-Selected and State-to-State Chemistry II. Proceedings of SPIE. No.2124. Society of Photo-Optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 292-298. ISBN 0-8194-1417-4. https://resolver.caltech.edu/CaltechAUTHORS:20170918-131655519
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Abstract
Measurements of CH_3 have been made using resonance-enhanced multiphoton ionization (REMPI) in two different diamond growth environments. Spatial profiles of methyl above the substrate have been measured in a filament- assisted reactor, which show that the CH_3 concentration is depleted near the substrate. The CH_3 concentration at the substrate shows an approximate Arrhenius dependence on substrate temperature below 1000 K, characterized by an activation energy of 4 kcal/mole. Methyl measurements were also made in 35 Torr hydrogen/oxygen flame into which methane is injected near the substrate. Radial profiles of methyl, acquired using REMPI, and of CH_4, acquired using sampling mass spectroscopy, are in good qualitative agreement with the results of numerical simulations.
| Item Type: | Book Section | ||||||||
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| Additional Information: | © 1994 Society of Photo-Optical Instrumentation Engineers (SPIE). 17 June 1994. This work has been supported, in part, by the National Science Foundation under Grant CTS-9057921 and by the 17. J. Warnatz, in Combustion Chemistry, edited by W. C. Office of Naval Research, under contract N00014-90-J-1386. Gardiner, Jr. (Springer-Verlag, New York, 1984), p. 197. An additional equipment grant from the AT&T Foundation is gratefully acknowledged. | ||||||||
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| Series Name: | Proceedings of SPIE | ||||||||
| Issue or Number: | 2124 | ||||||||
| Record Number: | CaltechAUTHORS:20170918-131655519 | ||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20170918-131655519 | ||||||||
| Official Citation: | David G. Goodwin, Nick G. Glumac, Evaldo J. Corat, "Optical detection of CH3 during diamond chemical vapor deposition", Proc. SPIE 2124, Laser Techniques for State-Selected and State-to-State Chemistry II, (17 June 1994) http://dx.doi.org/10.1117/12.178103 | ||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||
| ID Code: | 81529 | ||||||||
| Collection: | CaltechAUTHORS | ||||||||
| Deposited By: | Ruth Sustaita | ||||||||
| Deposited On: | 19 Sep 2017 17:13 | ||||||||
| Last Modified: | 03 Oct 2019 18:43 |
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