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Scanning confocal vibrometer microscope for vibration analysis of energy-harvesting MEMS in wearables

Kowarsch, Robert and Janzen, Jürgen and Cho, Hyunjun and Choo, Hyuck and Rembe, Christian (2017) Scanning confocal vibrometer microscope for vibration analysis of energy-harvesting MEMS in wearables. Technisches Messen, 84 (S1). S131-S137. ISSN 0171-8096. https://resolver.caltech.edu/CaltechAUTHORS:20171017-083418786

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Abstract

We present a scanning confocal laser-Doppler vibrometer microscope for sensitive, contactless measurement of microelectromechanical systems (MEMS). This systems enables the dynamic analysis up to 3.2 MHz with a lateral resolution of few micrometers. We show measurements on developed MEMS for vocal-energy harvesting in wearables and medical implants. For efficient harvesting a cantilever beam with a serpentine form was designed with a fundamental resonance at 200 Hz. We verified the simulated mode shapes with our vibration measurements. The observed deviations in resonance frequencies between simulation and measurement are due to modelling and manufacturing dissimilarities.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1515/teme-2017-0042DOIArticle
ORCID:
AuthorORCID
Choo, Hyuck0000-0002-8903-7939
Additional Information:© 2017 Oldenbourg Wissenschaftsverlag GmbH. Published Online: 2017-09-20; Published in Print: 2017-09-26. The project on energy harvesters has been funded by the Caltech CI2 program, Powell Foundation, and Heritage Foundation.
Group:Heritage Medical Research Institute
Funders:
Funding AgencyGrant Number
Caltech Innovation Initiative (CI2)UNSPECIFIED
Charles Lee Powell FoundationUNSPECIFIED
Heritage FoundationUNSPECIFIED
Subject Keywords:Laser-Doppler vibrometry; interferometric measurement microscope; energy harvesting; MEMS; microsystems; vibration analysis
Issue or Number:S1
Record Number:CaltechAUTHORS:20171017-083418786
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20171017-083418786
Official Citation:Kowarsch, Robert, Jürgen Janzen, Christian Rembe, et al. "Scanning confocal vibrometer microscope for vibration analysis of energy-harvesting MEMS in wearables" tm - Technisches Messen, 84.s1 (2017): 131-137. Retrieved 17 Oct. 2017, from doi:10.1515/teme-2017-0042
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:82403
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:17 Oct 2017 21:33
Last Modified:24 Dec 2020 00:45

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