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Electrothermal Driving Microcantilever Resonator as a Platform for Chemical Gas Sensing

Dong, Ying and Gao, Wei and Zheng, Yi and You, Zheng (2010) Electrothermal Driving Microcantilever Resonator as a Platform for Chemical Gas Sensing. Tsinghua Science and Technology, 15 (5). pp. 481-488. ISSN 1007-0214.

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In the current research, the use of a micromachined cantilever resonator as a platform for chemical gas sensing was examined. The microcantilever resonator integrates an electrothermal driving unit and a piezoresistive detecting unit, and it is fabricated by direct bonding a silicon-on-insulator (SOl) wafer. With a particular polymer layer coated on the surface of the microcantilever, a gas sensor for volatile organic components (VOGs) detection can be realized. The operation mechanism provides the microcantilever resonator with integrated circuit (IG) compatibility in terms of both the fabrication process and operating voltage. The configuration of the microcantilever resonator can optimize the performance of the gas sensor. The SOl wafer provides a solution for the integrated fabrication of the microstructure, transducers, electronics, and the precise control of the resonator parameters. In this paper, the principles, design, analysis, process, and demonstration of the gas sensor based on the microcantilever resonator are presented. The experimental results provide confirmation that the polymer-coated microcantilever resonator has excellent performance with regard to VOG detection.

Item Type:Article
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Gao, Wei0000-0002-8503-4562
Additional Information:© 2010 IEEE. Date of Publication: Oct. 2010. The fabrication of the microcantilever resonator was accomplished at the Institute of Semiconductors, Chinese Academy of Sciences (CAS). We are also grateful to Prof. Ji An and Dr. Ning Jin for their advice and contributions.
Funding AgencyGrant Number
Chinese Academy of SciencesUNSPECIFIED
Subject Keywords:microcantilever; resonator; gas sensor; electrothermal driving; volatile organic component
Issue or Number:5
Record Number:CaltechAUTHORS:20180129-105618289
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Official Citation:Y. Dong, W. Gao, Y. Zheng and Z. You, "Electrothermal driving microcantilever resonator as a platform for chemical gas sensing," in Tsinghua Science and Technology, vol. 15, no. 5, pp. 481-488, Oct. 2010. doi: 10.1016/S1007-0214(10)70091-2
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:84561
Deposited By: Ruth Sustaita
Deposited On:31 Jan 2018 19:06
Last Modified:09 Mar 2020 13:18

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