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Coarsening model of cavity nucleation and thin film delamination from single-crystal BaTiO3 with proton implantation

Hong, Jung-Wuk and Pyeon, Jae-Ho and Tedesco, Joseph W. and Park, Young-Bae (2007) Coarsening model of cavity nucleation and thin film delamination from single-crystal BaTiO3 with proton implantation. Physical Review B, 75 (21). Art. No. 214102. ISSN 1098-0121. https://resolver.caltech.edu/CaltechAUTHORS:HONprb07a

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Abstract

The layer splitting mechanism of a proton implanted single crystal ferroelectric BaTiO3 thin film layer from its bulk BaTiO3 substrate has been investigated. The single crystal BaTiO3 thin film layer splits as the hydrogen gas diffuses and the internal cavity pressure increases. Ripening mechanism driven by the pressurized hydrogen in the implantation-induced damage zone makes coarsening of the cavities and causes the delamination of the thin layer during the annealing. A unique criterion relation of blister nucleation and evolution has been derived and a simplified debonding criterion is proposed in terms of dimensionless parameters based on the force equilibrium condition. A numerical simulation of two-bubble evolution and delamination of thin film is performed using a finite element method.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1103/PhysRevB.75.214102DOIUNSPECIFIED
Additional Information:© 2007 The American Physical Society (Received 9 November 2006; revised 22 February 2007; published 5 June 2007) This work has been supported by the Army Research Office (ARO-MURI) under Grant No. DAAD 19-01-1-0517.
Funders:
Funding AgencyGrant Number
Army Research Office (ARO)DAAD 19-01-1-0517
Subject Keywords:barium compounds; ferroelectric thin films; ion implantation; delamination; annealing; bubbles; voids (solid)
Issue or Number:21
Record Number:CaltechAUTHORS:HONprb07a
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:HONprb07a
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:8483
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:15 Aug 2007
Last Modified:02 Oct 2019 23:51

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