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Effect of elevated substrate temperature deposition on the mechanical losses in tantala thin film coatings

Vajente, G. and Ananyeva, A. and Billingsley, G. and Gustafson, E. and Heptonstall, A. and Torrie, C. and Adhikari, R. X. (2018) Effect of elevated substrate temperature deposition on the mechanical losses in tantala thin film coatings. Classical and Quantum Gravity, 35 (7). Art. No. 075001. ISSN 0264-9381. doi:10.1088/1361-6382/aaad7c.

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Brownian thermal noise in dielectric multilayer coatings limits the sensitivity of current and future interferometric gravitational wave detectors. In this work we explore the possibility of improving the mechanical losses of tantala, often used as the high refractive index material, by depositing it on a substrate held at elevated temperature. Promising results have been previously obtained with this technique when applied to amorphous silicon. We show that depositing tantala on a hot substrate reduced the mechanical losses of the as-deposited coating, but subsequent thermal treatments had a larger impact, as they reduced the losses to levels previously reported in the literature. We also show that the reduction in mechanical loss correlates with increased medium range order in the atomic structure of the coatings using x-ray diffraction and Raman spectroscopy. Finally, a discussion is included on our results, which shows that the elevated temperature deposition of pure tantala coatings does not appear to reduce mechanical loss in a similar way to that reported in the literature for amorphous silicon; and we suggest possible future research directions.

Item Type:Article
Related URLs:
URLURL TypeDescription
Vajente, G.0000-0002-7656-6882
Billingsley, G.0000-0002-4141-2744
Adhikari, R. X.0000-0002-5731-5076
Additional Information:© 2018 IOP Publishing Ltd. Received 10 November 2017; Accepted 7 February 2018; Accepted Manuscript online 7 February 2018; Published 23 February 2018. Part of this work was performed at the Stanford Nano Shared Facilities (SNSF), supported by the National Science Foundation under award ECCS-1542152. In the UK, we would like to thank the UK Science and Technology Facilities Council (STFC, project refs: ST/L000946/1, ST/L000938/1, ST/L003465/1, ST/N005422/1 and ST/N005406/1) in addition to support from SUPA, the Royal Society, the Royal Society of Edinburgh, the University of Glasgow, the University of Strathclyde and the University of the West of Scotland. IWM is supported by a Royal Society Research Fellowship and S Reid was supported by a Royal Society Industry Fellowship and Wolfson Research Merit award. LJG, RA, RS, SR, FS and LM are supported by the Natural Sciences and Engineering Research Council of Canada (NSERC) and the Fonds de recherche Québec, Nature et technologies (FQRNT). The work performed at Polytechnique Montréal and at the Université de Montréal has been supported in part by the NSERC Discovery Grants of the participating researchers. The authors also thank their colleagues within GEO and the LIGO Scientific Collaboration for advice and support. LIGO was constructed by the California Institute of Technology and Massachusetts Institute of Technology with funding from the National Science Foundation, and operates under cooperative agreement PHY-0757058. Advanced LIGO was built under award PHY-0823459. This paper has LIGO document number LIGO-P1700372.
Funding AgencyGrant Number
Science and Technology Facilities Council (STFC)ST/L000946/1
Science and Technology Facilities Council (STFC)ST/L000938/1
Science and Technology Facilities Council (STFC)ST/L003465/1
Science and Technology Facilities Council (STFC)ST/N005422/1
Science and Technology Facilities Council (STFC)ST/N005406/1
Scottish Universities Physics AllianceUNSPECIFIED
Royal Society of EdinburghUNSPECIFIED
University of GlasgowUNSPECIFIED
University of StrathclydeUNSPECIFIED
University of the West of ScotlandUNSPECIFIED
Natural Sciences and Engineering Research Council of Canada (NSERC)UNSPECIFIED
Fonds de Recherche du Québec en Nature et Technologies (FRQNT)UNSPECIFIED
Subject Keywords:dielectric coatings, tantala, gravitational wave detectors, thermal noise, ion-beam sputtering, magnetron sputtering, gravitational waves
Other Numbering System:
Other Numbering System NameOther Numbering System ID
LIGO DocumentLIGO-P1700372
Issue or Number:7
Record Number:CaltechAUTHORS:20180315-074822732
Persistent URL:
Official Citation:G Vajente et al 2018 Class. Quantum Grav. 35 075001
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:85322
Deposited By: Tony Diaz
Deposited On:26 Mar 2018 22:31
Last Modified:12 Jul 2022 19:41

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