Yoon, Jun-Bo and Yoon, Yong-Hoon and Seo, Min-Ho and Ko, Seung-Deok and Song, Yong-Ha and Kim, Min-Wu and Yang, Hyun-Ho and Lee, Jeong Oen and Jang, Weon-Wi (2017) Efforts toward ideal microelectromechanical switches. In: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE , Piscataway, NJ, pp. 171-174. ISBN 978-1-5386-2732-7. http://resolver.caltech.edu/CaltechAUTHORS:20180322-101503751
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Abstract
Since a microelectromechanical (MEM) switch with an electrostatically actuated cantilever was first demonstrated by Petersen in 1978 [1], MEM switches have actively been researched by many research groups. However, comparing with the conventional metal-oxide-semiconductor fieldeffect transistor (MOSFET), MEM switches are still suffering from their high actuation voltage and insufficient operational reliability, which still remain as a difficult challenge to many MEMS researchers and hinder commercialization of the MEM switches. In this work, we look at what lies behind these difficulties in MEM switches and illustrate bright ideas that have been sought to enhance the actuation voltage and switch endurance (lifetime) problems.
| Item Type: | Book Section | |||||||||
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| Additional Information: | © 2017 IEEE. This work has been supported by the Global Frontier Project under Grant No. CISS-2012054187. | |||||||||
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| Subject Keywords: | Microelectromechanical (MEM) switches, actuation voltage, lifetime | |||||||||
| Record Number: | CaltechAUTHORS:20180322-101503751 | |||||||||
| Persistent URL: | http://resolver.caltech.edu/CaltechAUTHORS:20180322-101503751 | |||||||||
| Official Citation: | J. B. Yoon et al., "Efforts toward ideal microelectromechanical switches," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, 2017, pp. 171-174. doi: 10.1109/TRANSDUCERS.2017.7994015. URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7994015&isnumber=7993963 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 85413 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Tony Diaz | |||||||||
| Deposited On: | 26 Mar 2018 21:22 | |||||||||
| Last Modified: | 26 Mar 2018 21:22 |
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