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Efforts toward ideal microelectromechanical switches

Yoon, Jun-Bo and Yoon, Yong-Hoon and Seo, Min-Ho and Ko, Seung-Deok and Song, Yong-Ha and Kim, Min-Wu and Yang, Hyun-Ho and Lee, Jeong Oen and Jang, Weon-Wi (2017) Efforts toward ideal microelectromechanical switches. In: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE , Piscataway, NJ, pp. 171-174. ISBN 978-1-5386-2732-7.

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Since a microelectromechanical (MEM) switch with an electrostatically actuated cantilever was first demonstrated by Petersen in 1978 [1], MEM switches have actively been researched by many research groups. However, comparing with the conventional metal-oxide-semiconductor fieldeffect transistor (MOSFET), MEM switches are still suffering from their high actuation voltage and insufficient operational reliability, which still remain as a difficult challenge to many MEMS researchers and hinder commercialization of the MEM switches. In this work, we look at what lies behind these difficulties in MEM switches and illustrate bright ideas that have been sought to enhance the actuation voltage and switch endurance (lifetime) problems.

Item Type:Book Section
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URLURL TypeDescription
Yoon, Jun-Bo0000-0002-9447-3807
Lee, Jeong Oen0000-0001-5060-8370
Additional Information:© 2017 IEEE. This work has been supported by the Global Frontier Project under Grant No. CISS-2012054187.
Funding AgencyGrant Number
Ministry of Science, ICT and Future Planning (Korea)CISS-2012054187
Subject Keywords:Microelectromechanical (MEM) switches, actuation voltage, lifetime
Record Number:CaltechAUTHORS:20180322-101503751
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Official Citation:J. B. Yoon et al., "Efforts toward ideal microelectromechanical switches," 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, 2017, pp. 171-174. doi: 10.1109/TRANSDUCERS.2017.7994015. URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:85413
Deposited By: Tony Diaz
Deposited On:26 Mar 2018 21:22
Last Modified:15 Nov 2021 20:28

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