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Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation

Chen, Po-Jui and Rodger, Damien C. and Meng, Ellis M. and Humayun, Mark S. and Tai, Yu-Chong (2007) Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation. Journal of Microelectromechanical Systems, 16 (2). pp. 223-231. ISSN 1057-7157. https://resolver.caltech.edu/CaltechAUTHORS:CHEjmems07

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Abstract

This paper presents the world's first surface-micromachined parylene dual-valved microfluidic system for on-chip unpowered microflow regulation. Incorporating a normally closed and a normally open passive check valve in a back-to-back configuration inside a microchannel, the dual-valved system has successfully regulated the pressure/flow rate of air and liquid without power consumption or electronic/magnetic/thermal transduction. By exclusively using parylene C (poly-para-xylylene C) as the structural material, the fabricated valves have higher flexibility to shunt flows in comparison to other conventional thin-film valves. A state-of-the-art multilayer polymer surface-micromachining technology is applied here to fabricate parylene microvalves of various designs. The parylene-based devices are completely biocompatible/implantable and provide an economical paradigm for fluidic control in integrated lab-on-a-chip systems. Design, fabrication, and characterization of the parylene dual valves are discussed in this paper. Testing results have successfully demonstrated that the microflow regulation of the on-chip dual-valved system can achieve a bandpass profile in which the pressure control range is 0-50 mmHg with corresponding flow rates up to 2 mL/min for air flow and 1 muL/min flow rate for water flow. This regulation range is suitable for controlling biological conditions in human health care, with potential applications including drug delivery and regulation of elevated intraocular pressure (IOP) in glaucoma patients.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/JMEMS.2006.889534DOIUNSPECIFIED
ORCID:
AuthorORCID
Rodger, Damien C.0000-0002-1583-5946
Humayun, Mark S.0000-0002-5830-5208
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2007 IEEE. Reprinted with permission. Manuscript received June 28, 2006; revised September 1, 2006. [Posted online: 2007-04-10] This work was supported in part by the Engineering Research Centers Program of the National Science Foundation by NSF Award EEC-0310723. Subject Editor Y. Zobar. The authors especially thank T. Roper for his fabrication assistance.
Funders:
Funding AgencyGrant Number
NSFEEC-0310723
Subject Keywords:Microflow control, microfluidics, microvalve, parylene.
Issue or Number:2
Record Number:CaltechAUTHORS:CHEjmems07
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:CHEjmems07
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:8551
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:20 Aug 2007
Last Modified:09 Mar 2020 13:19

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