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A new method to manufacture parylene microcapillaries

Chou, Tzu-Chieh and Pi, Yudan and Xu, Han and Tai, Yu-Chong (2018) A new method to manufacture parylene microcapillaries. In: 2018 IEEE Micro Electro Mechanical Systems (MEMS). IEEE , Piscataway, NJ, pp. 1245-1248. ISBN 978-1-5386-4782-0.

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A new way to fabricate extremely long and uniform Parylene microcapillaries with a minimum inner diameter of 3 μm and a length exceeding 30 cm is reported here. The method starts with drawing sacrificial poly(ethylene carbonate) (PEC) fibers from its chloroform solution and then forms hollow capillaries by coating the fibers with Parylene and removing the sacrificial PEC at its thermolytic temperature. For the fiber drawing, the relation of fiber diameter to other parameters including drawing speed, fiber aspect ratio, solution viscosity and solvent evaporation rate are studied at 0 and 25 °C. It is found that 0 °C is near the optimal temperature in terms of fiber diameter uniformity. Finally, this work also reports a self-expelling mechanism of the molten PEC at its thermolytic temperature from inside the Parylene-coated PEC fibers, which greatly reduces the sacrificial time to only tens of minutes.

Item Type:Book Section
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URLURL TypeDescription
Chou, Tzu-Chieh0000-0002-6074-8286
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2018 IEEE. The authors thank all the Caltech MEMS Lab members for their help with the work and fabrication. Yudan Pi gratefully acknowledges the financial support from China Scholarship Council.
Funding AgencyGrant Number
China Scholarship CouncilUNSPECIFIED
Record Number:CaltechAUTHORS:20180503-104944622
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Official Citation:T. C. Chou, Y. Pi, H. Xu and Y. C. Tai, "A new method to manufacture parylene microcapillaries," 2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, United Kingdom, 2018, pp. 1245-1248. doi: 10.1109/MEMSYS.2018.8346789. URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:86208
Deposited By: Tony Diaz
Deposited On:03 May 2018 20:21
Last Modified:03 Oct 2019 19:40

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