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Growth of vertically aligned Si wire arrays over large areas (>1 cm^2) with Au and Cu catalysts

Kayes, Brendan M. and Filler, Michael A. and Putnam, Morgan C. and Kelzenberg, Michael D. and Lewis, Nathan S. and Atwater, Harry A. (2007) Growth of vertically aligned Si wire arrays over large areas (>1 cm^2) with Au and Cu catalysts. Applied Physics Letters, 91 (10). Art. No. 103110. ISSN 0003-6951. doi:10.1063/1.2779236.

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Arrays of vertically oriented Si wires with diameters of 1.5 µm and lengths of up to 75 µm were grown over areas >1 cm^2 by photolithographically patterning an oxide buffer layer, followed by vapor-liquid-solid growth with either Au or Cu as the growth catalyst. The pattern fidelity depended critically on the presence of the oxide layer, which prevented migration of the catalyst on the surface during annealing and in the early stages of wire growth. These arrays can be used as the absorber material in novel photovoltaic architectures and potentially in photonic crystals in which large areas are needed.

Item Type:Article
Related URLs:
URLURL TypeDescription
Filler, Michael A.0000-0003-4239-8558
Kelzenberg, Michael D.0000-0002-6249-2827
Lewis, Nathan S.0000-0001-5245-0538
Atwater, Harry A.0000-0001-9435-0201
Additional Information:© 2007 American Institute of Physics. (Received 18 July 2007; accepted 12 August 2007; published online 5 September 2007) This work was supported by BP, the Department of Energy, Office of Basic Energy Sciences, and the Center for Science and Engineering of Materials, an NSF Materials Research Science and Engineering Center at Caltech.
Funding AgencyGrant Number
Department of Energy (DOE)UNSPECIFIED
Subject Keywords:annealing; catalysts; crystal growth from solution; crystal growth from vapour; elemental semiconductors; photolithography; semiconductor growth; silicon; wires
Issue or Number:10
Record Number:CaltechAUTHORS:KAYapl07
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:8706
Deposited By: Archive Administrator
Deposited On:07 Sep 2007
Last Modified:08 Nov 2021 20:52

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