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In-situ biaxial texture analysis of MgO films during growth on amorphous substrates by ion-beam-assisted deposition

Brewer, Rhett T. and Arendt, Paul N. and Groves, James R. and Atwater, Harry A. (2001) In-situ biaxial texture analysis of MgO films during growth on amorphous substrates by ion-beam-assisted deposition. In: Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing. Proceedings of SPIE. No.4468. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 124-130. ISBN 0819441821. https://resolver.caltech.edu/CaltechAUTHORS:20180706-150808856

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Abstract

We used a kinematical electron scattering model to develop a RHEED based method for performing quantitative analysis of mosaic polycrystalline thin film in-plane and out-of-plain grain orientation distributions. RHEED based biaxial texture measurements are compared to x-ray and transmission electron microscopy measurements to establish the validity of the RHEED analysis method. MgO was grown on amorphous Si3N4 by ion beam-assisted deposition (IBAD) using 750 eV Ar+ ions and MgO e-beam evaporation. The ion/MgO flux ratio was varied between 0.66 and 0.42. In situ RHEED analysis reveals that during nucleation the out-of-plane orientation distribution is very broad (almost random), but narrows very quickly once well-oriented grains reach a critical size. Under optimal conditions a competition between selective sputtering and surface roughening yields a minimum out-of-plane texture at about 100 angstrom, which degrades with increasing film thickness. The narrowest in- plane orientation distribution (5.4 degrees FWHM) was found to be at an ion/MgO flux ratio between 0.55 and 0.51, in good agreement with previous experiments. The systematic offsets between RHEED analysis and x-ray measurements of biaxial texture, coupled with evidence that biaxial texture improves with increasing film thickness, indicates that RHEED is a superior technique for probing surface biaxial texture.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1117/12.452547DOIArticle
ORCID:
AuthorORCID
Atwater, Harry A.0000-0001-9435-0201
Additional Information:© 2001 Society of Photo-Optical Instrumentation Engineers (SPIE). The authors would like to thank J.F. Whitacre for his assistance with synchrotron measurements, as well as Luke Emmert and Phillip C. Yashar for grazing incidence X-ray diffraction measurements of IBAD MgO in-plane orientation distribution. This work was supported by the DARPA VIP III and MURI programs.
Funders:
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Subject Keywords:IBAD, MgO, biaxial texture, RHEED, ion beam-assisted deposition
Series Name:Proceedings of SPIE
Issue or Number:4468
Record Number:CaltechAUTHORS:20180706-150808856
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20180706-150808856
Official Citation:Rhett Brewer, Paul N. Arendt, James R. Groves, Harry A. Atwater, "In-situ biaxial texture analysis of MgO films during growth on amorphous substrates by ion-beam-assisted deposition", Proc. SPIE 4468, Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing, (27 December 2001); doi: 10.1117/12.452547; https://doi.org/10.1117/12.452547
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:87615
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:09 Jul 2018 15:26
Last Modified:03 Oct 2019 19:57

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