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Lithographic nanofabrication of optical cavities

DeRose, Guy A. and Lončar, Marko and Adams, Mark L. and Hochberg, Michael and Scherer, Axel (2005) Lithographic nanofabrication of optical cavities. In: Nanofabrication: Technologies, Devices, and Applications. Proceedings of SPIE. No.5592. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 44-50. ISBN 0819455458.

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Lithographic control over nanostructures has recently evolved to an accuracy that permits the sub-wavelength manipulation of light within high refractive index semiconductors. We have used this lithographic control to fabricate two-dimensional photonic crystal cavities and micro-ring resonators. Here we will show the fabrication techniques utilized for the construction of High-Q nanocavities and, in particular, focus on the influence of present-day lithographic and etching procedures on the performance of the cavities. Applications of these optical cavities range from communications to chemical sensing and we will describe the effects of geometry on the different applications. We show the use of optical cavities for the miniaturization of optical spectroscopy systems with ultra-high spatial and spectral resolution.

Item Type:Book Section
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Additional Information:© 2005 Society of Photo-Optical Instrumentation Engineers (SPIE). The authors gratefully acknowledge funding from the National Science Foundation, DARPA and the Air Force Office of Scientific Research
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Air Force Office of Scientific Research (AFOSR)UNSPECIFIED
Subject Keywords:nanofabrication, optical cavity, chemical sensor, lithography
Series Name:Proceedings of SPIE
Issue or Number:5592
Record Number:CaltechAUTHORS:20180710-093710115
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Official Citation:Guy A. DeRose, Marko Loncar, Mark L. Adams, Michael Hochberg, Axel Scherer, "Lithographic nanofabrication of optical cavities", Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); doi: 10.1117/12.571540;
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:87687
Deposited By: George Porter
Deposited On:10 Jul 2018 17:03
Last Modified:15 Nov 2021 20:50

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