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Monolithic hemispherical microlenses fabricated by selective oxidation of AlGaAs

Xu, Y. and Cheng, C. C. and Lee, R. K. and O'Brien, J. and Yariv, A. and Scherer, Axel (1998) Monolithic hemispherical microlenses fabricated by selective oxidation of AlGaAs. In: Light-Emitting Diodes: Research, Manufacturing, and Applications II. Proceedings of SPIE. No.3279. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 172-179. ISBN 0819427187. https://resolver.caltech.edu/CaltechAUTHORS:20180710-101708715

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Abstract

We have developed a new method for the fabrication of monolithic AlGaAs microlenses on the surface of GaAs/AlGaAs light emitting diodes by combing crystal growth, ion etching and steam oxidation with wet chemical removal of the oxide. Control over the precise processing parameters has resulted in the precise control over the shape, radius, position and smoothness of the microfabricated hemispheres. These microlenses can readily be used for the fabrication of highly efficient light-emitting diodes.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1117/12.304423DOIArticle
Additional Information:© 1998 Society of Photo-Optical Instrumentation Engineers (SPIE). The authors wish to thank O. Painter for helpful discussions. This research was funded by the Army Research Office, the National Science Foundation and the Office of Naval Research which are also gratefully acknowledged.
Funders:
Funding AgencyGrant Number
Army Research Office (ARO)UNSPECIFIED
NSFUNSPECIFIED
Office of Naval Research (ONR)UNSPECIFIED
Subject Keywords:semiconductor laser, Schottky barrier diode, electrostatic current confinement, MESFET
Series Name:Proceedings of SPIE
Issue or Number:3279
Record Number:CaltechAUTHORS:20180710-101708715
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20180710-101708715
Official Citation:Yong Xu, Chuan-Cheng Cheng, Reginald K. Lee, John D. O'Brien, Amnon Yariv, Axel Scherer, "Monolithic hemispherical microlenses fabricated by selective oxidation of AlGaAs", Proc. SPIE 3279, Light-Emitting Diodes: Research, Manufacturing, and Applications II, (7 April 1998); doi: 10.1117/12.304423; https://doi.org/10.1117/12.304423
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:87693
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:10 Jul 2018 17:49
Last Modified:03 Oct 2019 19:58

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