Xu, Y. and Cheng, C. C. and Lee, R. K. and O'Brien, J. and Yariv, A. and Scherer, Axel (1998) Monolithic hemispherical microlenses fabricated by selective oxidation of AlGaAs. In: Light-Emitting Diodes: Research, Manufacturing, and Applications II. Proceedings of SPIE. No.3279. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 172-179. ISBN 0819427187. https://resolver.caltech.edu/CaltechAUTHORS:20180710-101708715
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Abstract
We have developed a new method for the fabrication of monolithic AlGaAs microlenses on the surface of GaAs/AlGaAs light emitting diodes by combing crystal growth, ion etching and steam oxidation with wet chemical removal of the oxide. Control over the precise processing parameters has resulted in the precise control over the shape, radius, position and smoothness of the microfabricated hemispheres. These microlenses can readily be used for the fabrication of highly efficient light-emitting diodes.
| Item Type: | Book Section | ||||||||
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| Additional Information: | © 1998 Society of Photo-Optical Instrumentation Engineers (SPIE). The authors wish to thank O. Painter for helpful discussions. This research was funded by the Army Research Office, the National Science Foundation and the Office of Naval Research which are also gratefully acknowledged. | ||||||||
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| Subject Keywords: | semiconductor laser, Schottky barrier diode, electrostatic current confinement, MESFET | ||||||||
| Series Name: | Proceedings of SPIE | ||||||||
| Issue or Number: | 3279 | ||||||||
| DOI: | 10.1117/12.304423 | ||||||||
| Record Number: | CaltechAUTHORS:20180710-101708715 | ||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20180710-101708715 | ||||||||
| Official Citation: | Yong Xu, Chuan-Cheng Cheng, Reginald K. Lee, John D. O'Brien, Amnon Yariv, Axel Scherer, "Monolithic hemispherical microlenses fabricated by selective oxidation of AlGaAs", Proc. SPIE 3279, Light-Emitting Diodes: Research, Manufacturing, and Applications II, (7 April 1998); doi: 10.1117/12.304423; https://doi.org/10.1117/12.304423 | ||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||
| ID Code: | 87693 | ||||||||
| Collection: | CaltechAUTHORS | ||||||||
| Deposited By: | George Porter | ||||||||
| Deposited On: | 10 Jul 2018 17:49 | ||||||||
| Last Modified: | 15 Nov 2021 20:50 |
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