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Portable optical microscope-on-a-chip

Cui, Xiquan and Heng, Xin and Erickson, David and Psaltis, Demetri and Yang, Changhuei (2006) Portable optical microscope-on-a-chip. In: Nanobiophotonics and Biomedical Applications III. Proceedings of SPIE. No.6095. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, Art. No. 609509. ISBN 0819461377.

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In this paper, we present a novel high resolution optical imaging device on chip. It is based on a line of nano holes defined in an optically opaque aluminum film on a CMOS imaging sensor chip. Because it's free of bulky optical elements and compatible to the planar micro fabrication process, it is very promising to become an important component for the on-chip high resolution imaging in the future. The fabrication and operation of this novel on-chip microscope is explained in details. The performance is evaluated theoretically and is verified experimentally by examining the profile of a laser spot formed by a 10X objective lens.

Item Type:Book Section
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Yang, Changhuei0000-0001-8791-0354
Additional Information:© 2006 Society of Photo-Optical Instrumentation Engineers (SPIE). We are grateful for the generous help from Professor Axel Scherer, Dr. Joerg Schilling, Professor Ali Hajimiri and Yu-Jiu Wang in fabrication. The assistance from Caltech Watson cleanroom is well appreciated. This project is funded by DARPA’s center for optofluidic integration.
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Subject Keywords:Optofluidics, Biophotonics, Nanophotonics, Microfluidics, Microscopy, Beam profiler
Series Name:Proceedings of SPIE
Issue or Number:6095
Record Number:CaltechAUTHORS:20180716-114404185
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Official Citation:Xiquan Cui, Xin Heng, David Erickson, Demetri Psaltis, Changhuei Yang, "Portable optical microscope-on-a-chip", Proc. SPIE 6095, Nanobiophotonics and Biomedical Applications III, 609509 (28 February 2006); doi: 10.1117/12.640328;
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:87888
Deposited By: George Porter
Deposited On:16 Jul 2018 22:57
Last Modified:03 Oct 2019 20:00

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