Mii, Y. J. and Karunasini, R. P> G. and Wang, K. L. and Bai, Gang (1989) Growth and characterization of doped GaAs/AlGaAs multiple quantum well structures on Si substrates for infrared detection. Journal of Vacuum Science and Technology B, 7 (2). pp. 341-344. ISSN 1071-1023. doi:10.1116/1.584746. https://resolver.caltech.edu/CaltechAUTHORS:MIIjvstb89
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Abstract
Doped GaAs/AlGaAs multiple quantum well structures were grown on Si substrates by molecular-beam epitaxy. The crystallinity of the epitaxial layers was examined by cross-sectional transmission electron microscopy and an x-ray rocking curve technique. The threading dislocation density of the multiple quantum well region was estimated to be 108 cm–2 by transmission electron microscopy. The x-ray rocking curve measurement revealed a full width at half-maximum of 380 arcsec, with no superlattice peak observed. Electrical and optical characterizations by tunneling current and intersubband infrared absorption showed comparable properties with similar structures grown directly on a GaAs substrate. The effect of crystallinity on the electrical and optical properties of the multiple quantum well structures is discussed.
| Item Type: | Article | ||||||
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| Additional Information: | © 1989 American Vacuum Society. (Received 22 September 1988; accepted 22 September 1988) The authors would like to thank Dr. R. Alt at Aerospace Corporation for FTIR measurements. This work was supported in part by DOD-DRIP under ONR and ARO and by Intel-Micro program. | ||||||
| Subject Keywords: | QUANTUM WELL STRUCTURES; CRYSTAL DOPING; SILICON; SORPTIVE PROPERTIES; MOLECULAR BEAM EPITAXY; TRANSMISSION ELECTRON MICROSCOPY; X–RAY DIFFRACTION; DISLOCATIONS; TUNNEL EFFECT; INFRARED SPECTRA; INTERBAND TRANSITIONS; ELECTRICAL PROPERTIES; OPTICAL PROPERTIES; GALLIUM ARSENIDES; ALUMINIUM ARSENIDES; PHOTODETECTORS; CRYSTAL STRUCTURE | ||||||
| Issue or Number: | 2 | ||||||
| DOI: | 10.1116/1.584746 | ||||||
| Record Number: | CaltechAUTHORS:MIIjvstb89 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:MIIjvstb89 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 8814 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Archive Administrator | ||||||
| Deposited On: | 19 Sep 2007 | ||||||
| Last Modified: | 08 Nov 2021 20:53 |
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