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Miniature illuminator for laser Doppler velocimeter assembled on micromachined silicon optical bench

Ksendzov, A. and Martin, R. D. and Modarress, D. and Gharib, M. (1999) Miniature illuminator for laser Doppler velocimeter assembled on micromachined silicon optical bench. In: Miniaturized Systems with Micro-Optics and MEMS. Proceedings of SPIE. No.3878. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 304-309. ISBN 9780819434753. https://resolver.caltech.edu/CaltechAUTHORS:20180724-131523595

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Abstract

We have built a miniature illuminator for Laser Doppler velocimeter on micromachined silicon optical bench utilizing a novel optical scheme. We used two intersecting coherent beams from the two opposing facets of semiconductor laser die to form a standing interference pattern needed for the particle detection and velocity measurement. Such devices are of interest to NASA for investigating wind patterns and dust loading on planets with atmosphere. They have been applied to problems where the liquid or gas flux must be characterized without disturbing the flow. In addition, the small probe volume makes possible local flow characterization and profiling. The device fabrication, and the results of the fringe characterization and velocity measurements are presented and discussed.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1117/12.361273DOIArticle
ORCID:
AuthorORCID
Gharib, M.0000-0002-2204-9302
Additional Information:© 1999 Society of Photo-optical Instrumentation Engineers (SPIE). The research described in this paper was performed by the Center for Space Microelectronics Technology, Jet Propulsion Laboratory, California Institute of Technology, and was sponsored by the Directors research and Development Fund.
Funders:
Funding AgencyGrant Number
JPL Director’s Research and Development FundUNSPECIFIED
Subject Keywords:Doppler velocimeter, anemometer, micromachined, silicon optical bench
Series Name:Proceedings of SPIE
Issue or Number:3878
Record Number:CaltechAUTHORS:20180724-131523595
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20180724-131523595
Official Citation:Alexander Ksendzov, Richard D. Martin, Darius Modarress, Mory Gharib, "Miniature illuminator for laser Doppler velocimeter assembled on micromachined silicon optical bench", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361273; https://doi.org/10.1117/12.361273
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:88192
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:24 Jul 2018 20:39
Last Modified:03 Oct 2019 20:04

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