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Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space

Yang, Eui-Hyeok and Wiberg, Dean V. and Dekany, Richard (2000) Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space. In: Imaging Technology and Telescopes. Proceedings of SPIE. No.4091. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 83-89. ISBN 0819437360. http://resolver.caltech.edu/CaltechAUTHORS:20180725-101355416

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Abstract

A novel Microelectromechanical Systems (MEMS) deformable mirror (DM) technology for large, light weight, segmented space telescopes is being proposed. This technology is reported to provide an unprecedented imaging capability in a visible and near infrared spectral range. The MEMS-DM proposed in this paper consists of a continuous membrane mirror supported by electrostatic actuators with pixel-to-pixel spacing as small as 200 micrometer. An array of 4 X 4 electrostatic actuators for the DM has been successfully fabricated by a new membrane transfer technique. The fabricated actuator membrane has been characterized by using an optical surface profiler. The actuator shows a vertical deflection of 0.37 micrometer at 55 V. This device can also address requirements for smaller size and high resolution applications involving optical transmission through aberrating mediums such as imaging and optical communications through atmospheres, high resolution biometric retina signatures through the eye and endoscopic investigation of tissues and organs.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1117/12.405766DOIArticle
Additional Information:© 2000 Society of Photo-optical Instrumentation Engineers (SPIE).
Subject Keywords:deformable mirror (DM), Microelectromechamcal Systems (MEMS), adaptive optics, electrostatic actuator, single crystal silicon (SCS) membrane, continuous mirror, wafer-level membrane transfer, Next Generation Space Telescope (NGST)
Record Number:CaltechAUTHORS:20180725-101355416
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20180725-101355416
Official Citation:Eui-Hyeok Yang, Dean V. Wiberg, Richard G. Dekany, "Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space", Proc. SPIE 4091, Imaging Technology and Telescopes, (31 October 2000); doi: 10.1117/12.405766; https://doi.org/10.1117/12.405766
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:88245
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:25 Jul 2018 17:41
Last Modified:25 Jul 2018 17:41

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