CaltechAUTHORS
  A Caltech Library Service

Magnetically actuated MEMS scanning mirror

Miller, Raanan A. and Burr, Geoffrey W. and Tai, Yu-Chong and Psaltis, Demetri (1996) Magnetically actuated MEMS scanning mirror. In: Miniaturized Systems with Micro-Optics and Micromechanics. Proceedings of SPIE. No.2687. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 47-52. ISBN 0819420611. http://resolver.caltech.edu/CaltechAUTHORS:20180725-160850964

[img] PDF - Published Version
See Usage Policy.

593Kb

Use this Persistent URL to link to this item: http://resolver.caltech.edu/CaltechAUTHORS:20180725-160850964

Abstract

A 4 mm by 5 mm, magnetically actuated scanning MEMS mirror is fabricated by integration of bulk silicon micromachining and magnetic thin film head techniques. Large mirror deflection angles (0 - 70 degree(s)) are achieved. The MEMS mirror is demonstrated as a laser beam scanner in both conventional and compact holographic data storage system configurations.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1117/12.234635DOIArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 1996 Society of Photo-Optical Instrumentation Engineers (SPIE).
Subject Keywords:MEMS, magnetic, scanning mirror, holographic memory
Record Number:CaltechAUTHORS:20180725-160850964
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20180725-160850964
Official Citation:Raanan A. Miller, Geoffrey W. Burr, Yu-Chong Tai, Demetri Psaltis, "Magnetically actuated MEMS scanning mirror", Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); doi: 10.1117/12.234635; https://doi.org/10.1117/12.234635
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:88274
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:30 Jul 2018 17:23
Last Modified:30 Jul 2018 17:23

Repository Staff Only: item control page