Miller, Raanan A. and Burr, Geoffrey W. and Tai, Yu-Chong and Psaltis, Demetri (1996) Magnetically actuated MEMS scanning mirror. In: Miniaturized Systems with Micro-Optics and Micromechanics. Proceedings of SPIE. No.2687. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 47-52. ISBN 0819420611. https://resolver.caltech.edu/CaltechAUTHORS:20180725-160850964
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Abstract
A 4 mm by 5 mm, magnetically actuated scanning MEMS mirror is fabricated by integration of bulk silicon micromachining and magnetic thin film head techniques. Large mirror deflection angles (0 - 70 degree(s)) are achieved. The MEMS mirror is demonstrated as a laser beam scanner in both conventional and compact holographic data storage system configurations.
| Item Type: | Book Section | ||||||
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| Additional Information: | © 1996 Society of Photo-Optical Instrumentation Engineers (SPIE). | ||||||
| Subject Keywords: | MEMS, magnetic, scanning mirror, holographic memory | ||||||
| Series Name: | Proceedings of SPIE | ||||||
| Issue or Number: | 2687 | ||||||
| DOI: | 10.1117/12.234635 | ||||||
| Record Number: | CaltechAUTHORS:20180725-160850964 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20180725-160850964 | ||||||
| Official Citation: | Raanan A. Miller, Geoffrey W. Burr, Yu-Chong Tai, Demetri Psaltis, "Magnetically actuated MEMS scanning mirror", Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); doi: 10.1117/12.234635; https://doi.org/10.1117/12.234635 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 88274 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | George Porter | ||||||
| Deposited On: | 30 Jul 2018 17:23 | ||||||
| Last Modified: | 16 Nov 2021 00:25 |
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