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Planar laser-induced fluorescence imaging of Si and SiO during pulsed laser ablation of Si

Paul, P. H. and Capewell, D. L. and Goodwin, D. G. (1995) Planar laser-induced fluorescence imaging of Si and SiO during pulsed laser ablation of Si. In: Laser-Induced Thin Film Processing. Proceedings of SPIE. No.2403. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 39-48. ISBN 0819417505. https://resolver.caltech.edu/CaltechAUTHORS:20180725-160851247

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Abstract

Planar laser induced fluorescence has been used to acquire time sequence images of ground-state, neutral Si and SiO during laser ablation of an Si target in vacuum and in the presence of a background gas at a fluence of 3-4 J/cm^2. The SiO images, taken in air, strongly suggest that the observed SiO is created through reaction of silicon with oxygen at the contact front as the plume expands.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1117/12.206278DOIArticle
Additional Information:© 1995 Society of Photo-Optical Instrumentation Engineers (SPIE). PHP acknowleges support from the United States Department of Energy, Office of Basic Energy Sciences, Chemical Sciences Division. DLC and DGG acknowledge partial support from a National Science Foundation Presidential Young Investigator grant.
Funders:
Funding AgencyGrant Number
Department of Energy (DOE)UNSPECIFIED
NSFUNSPECIFIED
Series Name:Proceedings of SPIE
Issue or Number:2403
DOI:10.1117/12.206278
Record Number:CaltechAUTHORS:20180725-160851247
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20180725-160851247
Official Citation:Phillip H. Paul, Dale L. Capewell, David G. Goodwin, "Planar laser-induced fluorescence imaging of Si and SiO during pulsed laser ablation of Si", Proc. SPIE 2403, Laser-Induced Thin Film Processing, (10 April 1995); doi: 10.1117/12.206278; https://doi.org/10.1117/12.206278
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:88277
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:30 Jul 2018 17:54
Last Modified:16 Nov 2021 00:25

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