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Surface encapsulation for low-loss silicon photonics

Borselli, M. and Johnson, T. J. and Michael, C. P. and Henry, M. D. and Painter, O. (2007) Surface encapsulation for low-loss silicon photonics. Applied Physics Letters, 91 (13). Art. No. 131117. ISSN 0003-6951. doi:10.1063/1.2793820.

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Encapsulation layers are explored for passivating the surfaces of silicon to reduce optical absorption in the 1500 nm wavelength band. Surface-sensitive test structures consisting of microdisk resonators are fabricated for this purpose. Based on previous work in silicon photovoltaics, coatings of SiNx and SiO2 are applied under varying deposition and annealing conditions. A short dry thermal oxidation followed by a long high-temperature N2 anneal is found to be most effective at long-term encapsulation and reduction of interface absorption. Minimization of the optical loss is attributed to simultaneous reduction in sub-band-gap silicon surface states and hydrogen in the capping material.

Item Type:Article
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Henry, M. D.0000-0002-5201-0644
Painter, O.0000-0002-1581-9209
Additional Information:© 2007 American Institute of Physics. (Received 2 July 2007; accepted 13 September 2007; published online 28 September 2007) This work was supported through the DARPA EPIC program. For graduate fellowship support, we thank the Moore Foundation (M.B. and C.P.M.), NPSC (M.B.), HRL Laboratories (M.B.), NSF (C.P.M.), and the Hertz Foundation (M.D.H.)
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Gordon and Betty Moore FoundationUNSPECIFIED
National Physical Science ConsortiumUNSPECIFIED
Hughes Research LaboratoriesUNSPECIFIED
Fannie and John Hertz FoundationUNSPECIFIED
Subject Keywords:annealing; coatings; elemental semiconductors; encapsulation; energy gap; hydrogen; infrared spectra; integrated optics; microcavities; micromechanical resonators; micro-optics; optical losses; optical resonators; oxidation; photovoltaic effects; silicon; silicon compounds; surface states; thermo-optical effects
Issue or Number:13
Record Number:CaltechAUTHORS:BORapl07
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:8923
Deposited By: Archive Administrator
Deposited On:01 Oct 2007
Last Modified:08 Nov 2021 20:54

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