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A water-immersible 2-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications

Huang, Chih-Hsien and Yao, Junjie and Wang, Lihong V. and Zou, Jun (2013) A water-immersible 2-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications. In: MOEMS and Miniaturized Systems XII. Proceedings of SPIE. No.8616. Society of Photo-Optical Instrumentation Engineers , Bellingham, WA, Art. No. 861607. ISBN 9780819493859. https://resolver.caltech.edu/CaltechAUTHORS:20180917-161719842

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Abstract

For both ultrasound and photoacoustic microscopic imaging, a fast scanning ability is required, whereas the liquid environment for acoustic propagation limits the usage of traditional MEMS scanning mirrors. In this paper, a new waterimmersible scanning mirror microsystem has been designed, fabricated and tested. To achieve reliable underwater scanning, flexible polymer torsion hinges fabricated by laser micromachining were used to support the reflective silicon mirror plate. Two efficient electromagnetic microactuators consisting of compact RF choke inductors and high-strength neodymium magnet disc were constructed to drive the silicon mirror plate around a fast axis and a slow axis, respectively. The performance of the water-immersible scanning mirror microsystem in both air and water were tested using the laser tracing method. For the fast axis, the resonance frequency reached 224 Hz in air and 164 Hz in water, respectively. The scanning angles in air and water under ±10 V AC driving (at the resonance frequencies) were ±13.6° and ±10°. The scanning angles in both air and water under ±16 V DC driving were ±12°. For the slow axis, the resonance frequency reached 55 Hz in air and 38 Hz in water, respectively. The scanning angles in air and water under ±10 V AC driving (at the resonance frequencies) were ±8.5° and ±6°. The scanning angles in both air and water under ±10 V DC driving were ± 6.5°. The feasibility of using such a water-immersible scanning mirror microsystem for scanning ultrasound microscopic (SAM) imaging has been demonstrated with a 25-MHz ultrasound pulse/echo system and a target consisting of three optical fibers.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1117/12.2003087DOIArticle
http://resolver.caltech.edu/CaltechAUTHORS:20160708-150736109Related ItemJournal Article
ORCID:
AuthorORCID
Wang, Lihong V.0000-0001-9783-4383
Zou, Jun0000-0002-9543-6135
Alternate Title:A water-immersible two-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications
Additional Information:© 2013 Society of Photo-Optical Instrumentation Engineers.
Subject Keywords:scanning mirror, ultrasound image, photoacoustic image
Series Name:Proceedings of SPIE
Issue or Number:8616
Record Number:CaltechAUTHORS:20180917-161719842
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20180917-161719842
Official Citation:Chih-Hsien Huang, Chih-Hsien Huang, Junjie Yao, Junjie Yao, Lihong V. Wang, Lihong V. Wang, Jun Zou, Jun Zou, } "A water-immersible two-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications", Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 861607 (13 March 2013); doi: 10.1117/12.2003087; https://doi.org/10.1117/12.2003087
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:89693
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:17 Sep 2018 23:53
Last Modified:09 Mar 2020 13:19

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