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Microtensile tests with the aid of probe microscopy for the study of MEMS materials

Chasiotis, Ioannis and Knauss, Wolfgang G. (2000) Microtensile tests with the aid of probe microscopy for the study of MEMS materials. In: Materials and Device Characterization in Micromachining III. Proceedings of SPIE. No.4175. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 96-103. ISBN 9780819438317.

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Mechanical tests of thin films require novel and sophisticated methods that can address the geometry and microstructure of the films. A new method of micro-tensile testing of MicroElectroMechanical Systems (MEMS) films has been demonstrated. An improved apparatus has been designed and implemented to measure the elastic tensile properties. (Young's modulus, Poisson's ration and tensile strength) of surface micromachined polysilicon specimans. The tensile specimans are dog-bone shaped ending in a large paddle for convenient electrostatic or, in the improved apparatus, UV adhesive gripping. The test section of the specimens is 400µm long with 2µmx50µm cross section. The method employs Atomic Force Microscope (AFM) acquired surface topologies of deforming specimans to determine (fields of) strain by way of the Digital Image Correlation method (DIC). With this method, high strength of non- linearly behaving materials under different environmental conditions can be tested by measuring the strains directly on the surface of the film with nanometer resolution in in-place and out-of-plane measurements.

Item Type:Book Section
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Chasiotis, Ioannis0000-0001-6521-8332
Additional Information:© 2000 Society of Photo-Optical Instrumentation Engineers (SPIE). The authors gratefully acknowledge the support by the Airforce Office of Scientific Research (Round Robin Program) through grant F49629-97-1-0324, under the direction of Major Brian Sanders and grant F49620-99-1-0091, under Drs. T. Hahn and D. Segalman.
Funding AgencyGrant Number
Air Force Office of Scientific Research (AFOSR)F49629-97-1-0324
Air Force Office of Scientific Research (AFOSR)F49620-99-1-0091
Subject Keywords:MEMS, polysilicon, tensile test, mechanical properties, UV adhesive grip, Atomic Force Microscopy, Digital Image Correlation, surface roughness
Series Name:Proceedings of SPIE
Issue or Number:4175
Record Number:CaltechAUTHORS:20181204-132724650
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Official Citation:Ioannis Chasiotis, Wolfgang G. Knauss, "Microtensile tests with the aid of probe microscopy for the study of MEMS materials," Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); doi: 10.1117/12.395616
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:91474
Deposited By: George Porter
Deposited On:05 Dec 2018 15:36
Last Modified:16 Nov 2021 03:41

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