Yang, Eui-Hyeok and Dekany, Richard and Padin, Steve (2003) Design and fabrication of a large vertical travel silicon inchworm microactuator for the Advanced Segmented Silicon Space Telescope. In: MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II. Proceedings of SPIE. No.4981. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 107-112. ISBN 9780819447814. https://resolver.caltech.edu/CaltechAUTHORS:20190221-110518917
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Abstract
Future concepts for ultra-large lightweight space telescopes include the telescopes with segmented silicon mirrors. This paper describes a proof-of-concept inchworm actuator designed to provide nanometer resolution, high stiffness, large output force, long travel range, and compactness for ultraprecision positioning applications in space. A vertically actuating inchworm microactuator is proposed to achieve large actuation travel by incorporating compliant beam structures within a silicon wafer. An inchworm actuator unit consists of a piezoelectric stack actuator, a driver, a pair of holders, a slider, and a pair of polymer beams connected to a centrally clamped flexure beam. Deep reactive ion etch experiments have been performed for constructing the actuator.
Item Type: | Book Section | ||||||
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Additional Information: | © 2003 Society of Photo-Optical Instrumentation Engineers (SPIE). The Jet Propulsion Laboratory, California Institute of Technology carried out the research described in this paper under a contract with the National Aeronautics and Space Administration. | ||||||
Funders: |
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Subject Keywords: | Advanced Segmented Silicon Space Telescope (ASSiST), Piezoelectric Actuator, Inchworm Actuator, Bistable Flexure Beam, Large Vertical Travel | ||||||
Series Name: | Proceedings of SPIE | ||||||
Issue or Number: | 4981 | ||||||
DOI: | 10.1117/12.476282 | ||||||
Record Number: | CaltechAUTHORS:20190221-110518917 | ||||||
Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20190221-110518917 | ||||||
Official Citation: | Eui-Hyeok Yang, Richard G. Dekany, and Stephen Padin "Design and fabrication of a large vertical travel silicon inchworm microactuator for the Advanced Segmented Silicon Space Telescope", Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); doi: 10.1117/12.476282; https://doi.org/10.1117/12.476282 | ||||||
Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
ID Code: | 93066 | ||||||
Collection: | CaltechAUTHORS | ||||||
Deposited By: | George Porter | ||||||
Deposited On: | 04 Mar 2019 15:58 | ||||||
Last Modified: | 16 Nov 2021 16:55 |
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