Lee, Benjamin G. and Scherer, Axel (2001) Diffractive lens fabrication by replica molding. In: Technical Digest. Summaries of papers presented at the 2001 Conference on Lasers and Electro-Optics. Postconference Technical Digest. IEEE , Piscataway, NJ, p. 84. ISBN 1-55752-662-1. https://resolver.caltech.edu/CaltechAUTHORS:20190315-150538196
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Abstract
Diffractive lenses and 2-D gratings were fabricated using electron-beam lithography and replica molding. With electron-beam lithography, feature sizes smaller than 60 nm can be achieved. We demonstrate that we can achieve similar feature sizes with replica molding. High-fidelity replica molding can become an important tool to complement electron-beam lithography in the fabrication of DOEs and other nanostructures.
| Item Type: | Book Section | ||||||
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| Additional Information: | © 2001 IEEE. | ||||||
| Record Number: | CaltechAUTHORS:20190315-150538196 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20190315-150538196 | ||||||
| Official Citation: | B. G. Lee and A. Scherer, "Diffractive lens fabrication by replica molding," Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest (IEEE Cat. No.01CH37170), Baltimore, MD, USA, 2001, pp. 84. doi: 10.1109/CLEO.2001.947505 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 93894 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Tony Diaz | ||||||
| Deposited On: | 15 Mar 2019 22:14 | ||||||
| Last Modified: | 03 Oct 2019 20:58 |
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