Diffractive lens fabrication by replica molding

Lee, Benjamin G. and Scherer, Axel (2001) Diffractive lens fabrication by replica molding. In: Technical Digest. Summaries of papers presented at the 2001 Conference on Lasers and Electro-Optics. Postconference Technical Digest. IEEE , Piscataway, NJ, p. 84. ISBN 1-55752-662-1. https://resolver.caltech.edu/CaltechAUTHORS:20190315-150538196

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Abstract

Diffractive lenses and 2-D gratings were fabricated using electron-beam lithography and replica molding. With electron-beam lithography, feature sizes smaller than 60 nm can be achieved. We demonstrate that we can achieve similar feature sizes with replica molding. High-fidelity replica molding can become an important tool to complement electron-beam lithography in the fabrication of DOEs and other nanostructures.

Item Type:

Book Section

Related URLs:

URL	URL Type	Description
https://doi.org/10.1109/CLEO.2001.947505	DOI	Article

ORCID:

Author	ORCID
Lee, Benjamin G.	0000-0002-1285-6522

Additional Information:

DOI:

10.1109/CLEO.2001.947505

Record Number:

CaltechAUTHORS:20190315-150538196

Persistent URL:

https://resolver.caltech.edu/CaltechAUTHORS:20190315-150538196

Official Citation:

B. G. Lee and A. Scherer, "Diffractive lens fabrication by replica molding," Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest (IEEE Cat. No.01CH37170), Baltimore, MD, USA, 2001, pp. 84. doi: 10.1109/CLEO.2001.947505

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No commercial reproduction, distribution, display or performance rights in this work are provided.

ID Code:

93894

Collection:

CaltechAUTHORS

Deposited By:

Tony Diaz

Deposited On:

15 Mar 2019 22:14

Last Modified:

16 Nov 2021 17:01

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