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Diffractive lens fabrication by replica molding

Lee, Benjamin G. and Scherer, Axel (2001) Diffractive lens fabrication by replica molding. In: Technical Digest. Summaries of papers presented at the 2001 Conference on Lasers and Electro-Optics. Postconference Technical Digest. IEEE , Piscataway, NJ, p. 84. ISBN 1-55752-662-1. https://resolver.caltech.edu/CaltechAUTHORS:20190315-150538196

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Abstract

Diffractive lenses and 2-D gratings were fabricated using electron-beam lithography and replica molding. With electron-beam lithography, feature sizes smaller than 60 nm can be achieved. We demonstrate that we can achieve similar feature sizes with replica molding. High-fidelity replica molding can become an important tool to complement electron-beam lithography in the fabrication of DOEs and other nanostructures.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/CLEO.2001.947505DOIArticle
ORCID:
AuthorORCID
Lee, Benjamin G.0000-0002-1285-6522
Additional Information:© 2001 IEEE.
Record Number:CaltechAUTHORS:20190315-150538196
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190315-150538196
Official Citation:B. G. Lee and A. Scherer, "Diffractive lens fabrication by replica molding," Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest (IEEE Cat. No.01CH37170), Baltimore, MD, USA, 2001, pp. 84. doi: 10.1109/CLEO.2001.947505
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:93894
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:15 Mar 2019 22:14
Last Modified:03 Oct 2019 20:58

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