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Two-dimensional photonic crystals for GaN-based blue light emitters

Yoshie, Tomoyuki and Cheng, Chuan-Cheng and Scherer, Axel (1998) Two-dimensional photonic crystals for GaN-based blue light emitters. In: Conference Digest. ISLC 1998 NARA. 1998 IEEE 16th International Semiconductor Laser Conference. IEEE , Piscataway, NJ, pp. 189-190. ISBN 0-7803-4223-2. https://resolver.caltech.edu/CaltechAUTHORS:20190318-132139055

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Abstract

We successfully fabricated two-dimensional photonic crystal structures for III-nitride light emitters by integrating electron-beam lithography, xenon/chlorine-based chemically assisted ion beam etching and a multilayer pattern transfer.


Item Type:Book Section
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URLURL TypeDescription
https://doi.org/10.1109/ISLC.1998.734200DOIArticle
Additional Information:© 1998 IEEE.
Record Number:CaltechAUTHORS:20190318-132139055
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190318-132139055
Official Citation:T. Yoshie, Chuan-Cheng Cheng and A. Scherer, "Two-dimensional photonic crystals for GaN-based blue light emitters," Conference Digest. ISLC 1998 NARA. 1998 IEEE 16th International Semiconductor Laser Conference (Cat. No. 98CH361130), Nara, Japan, 1998, pp. 189-190. doi: 10.1109/ISLC.1998.734200
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:93929
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:18 Mar 2019 20:27
Last Modified:03 Oct 2019 20:59

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