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Selective deposition of parylene C for underwater shear-stress sensors

Xu, Yong and Tai, Yu-Chong (2003) Selective deposition of parylene C for underwater shear-stress sensors. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers. Vol.2. IEEE , Piscataway, NJ, pp. 1307-1310. ISBN 0-7803-7731-1. https://resolver.caltech.edu/CaltechAUTHORS:20190320-144752255

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Abstract

This paper reports the application of selective parylene C deposition for the waterproof coating of underwater shear-stress sensors. The selective deposition has been achieved by electrically heating the sensing element during deposition, utilizing the dependence of parylene deposition rate on substrate temperature. The electrical power supplied was only 20 mW to raise the temperature of the sensing element 210°C above ambient due to the sensor's excellent thermal isolation. After selective parylene deposition, the sensing element was still exposed while other areas were covered by parylene. More effective interaction between the sensor and water was realized. With selective parylene deposition, excellent waterproof and high shear-stress sensitivity can be achieved at the same time.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/SENSOR.2003.1217013DOIArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2003 IEEE. This project was partly supported by the Office of Naval Research through an SBIR grant. The authors would also like to acknowledge the help of Mr. Hongyu Yu and Dr. Qiao Lin.
Funders:
Funding AgencyGrant Number
Office of Naval Research (ONR)UNSPECIFIED
DOI:10.1109/SENSOR.2003.1217013
Record Number:CaltechAUTHORS:20190320-144752255
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190320-144752255
Official Citation:Yong Xu and Yu-Chong Tai, "Selective deposition of parylene C for underwater shear-stress sensors," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), Boston, MA, USA, 2003, pp. 1307-1310 vol.2. doi: 10.1109/SENSOR.2003.1217013
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94004
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:20 Mar 2019 21:52
Last Modified:16 Nov 2021 17:02

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