Xu, Yong and Tai, Yu-Chong (2003) Selective deposition of parylene C for underwater shear-stress sensors. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers. Vol.2. IEEE , Piscataway, NJ, pp. 1307-1310. ISBN 0-7803-7731-1. https://resolver.caltech.edu/CaltechAUTHORS:20190320-144752255
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Abstract
This paper reports the application of selective parylene C deposition for the waterproof coating of underwater shear-stress sensors. The selective deposition has been achieved by electrically heating the sensing element during deposition, utilizing the dependence of parylene deposition rate on substrate temperature. The electrical power supplied was only 20 mW to raise the temperature of the sensing element 210°C above ambient due to the sensor's excellent thermal isolation. After selective parylene deposition, the sensing element was still exposed while other areas were covered by parylene. More effective interaction between the sensor and water was realized. With selective parylene deposition, excellent waterproof and high shear-stress sensitivity can be achieved at the same time.
Item Type: | Book Section | ||||||
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Additional Information: | © 2003 IEEE. This project was partly supported by the Office of Naval Research through an SBIR grant. The authors would also like to acknowledge the help of Mr. Hongyu Yu and Dr. Qiao Lin. | ||||||
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DOI: | 10.1109/SENSOR.2003.1217013 | ||||||
Record Number: | CaltechAUTHORS:20190320-144752255 | ||||||
Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20190320-144752255 | ||||||
Official Citation: | Yong Xu and Yu-Chong Tai, "Selective deposition of parylene C for underwater shear-stress sensors," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), Boston, MA, USA, 2003, pp. 1307-1310 vol.2. doi: 10.1109/SENSOR.2003.1217013 | ||||||
Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
ID Code: | 94004 | ||||||
Collection: | CaltechAUTHORS | ||||||
Deposited By: | Tony Diaz | ||||||
Deposited On: | 20 Mar 2019 21:52 | ||||||
Last Modified: | 16 Nov 2021 17:02 |
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