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Silicon micromachined SCALED technology

Miu, Denny K. and Tai, Yu-Chong (1995) Silicon micromachined SCALED technology. IEEE Transactions on Industrial Electronics, 42 (3). pp. 234-239. ISSN 0278-0046. https://resolver.caltech.edu/CaltechAUTHORS:20190320-145448638

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Abstract

Silicon micromachining technology will play an important role in the fabrication of high-bandwidth servo controlled microelectromechanical (mechatronic) components for super-compact disk drives. At the University of California, Los Angeles, and the California Institute of Technology, for the last three years, we have initiated a number of industry-supported joint research projects to develop the necessary technology building blocks for an integrated drive design of the future. These efforts include a silicon read/write head microgimbal with integrated electrical and mechanical interconnects, which targets the next-generation 30% form factor pico-sliders, and an electromagnetic piggyback microactuator in super-high-track-density applications, both of which utilize state-of-the-art silicon micromachining fabrication techniques.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/41.382133DOIArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 1995 IEEE. Manuscript received February 1, 1994; revised September 2, 1994. This work was conducted at the Caltech Micromachining Laboratory with support from the University of California MICRO program and matching funds from the Applied Magnetics, Hewlett-Packard, IBM, Magnacomp, Maxtor, Quantum, Read-Rite and Seagate Technology Corporations, and the National Storage Industry Consortium (NSIC). An earlier version of this paper was presented at the JSME International Conference on Advanced Mechatronics, Tokyo, Japan, Aug. 24, 1994. The authors would like to thank their many colleagues: Amish Desai, Wen Hsieh, Raanan Miller, Weilong Tang, Viktoria Temesvarv, and Shuyun Wu for the results of their combined efforts.
Funders:
Funding AgencyGrant Number
University of CaliforniaUNSPECIFIED
Applied MagneticsUNSPECIFIED
Hewlett-PackardUNSPECIFIED
IBMUNSPECIFIED
MagnacompUNSPECIFIED
MaxtorUNSPECIFIED
QuantumUNSPECIFIED
Read-RiteUNSPECIFIED
Seagate TechnologyUNSPECIFIED
National Storage Industry ConsortiumUNSPECIFIED
Issue or Number:3
Record Number:CaltechAUTHORS:20190320-145448638
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190320-145448638
Official Citation:D. K. Miu and Yu-Chong Tai, "Silicon micromachined SCALED technology," in IEEE Transactions on Industrial Electronics, vol. 42, no. 3, pp. 234-239, June 1995. doi: 10.1109/41.382133
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94005
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:20 Mar 2019 22:01
Last Modified:03 Oct 2019 20:59

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