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Silicon micromachined electromagnetic microactuators for rigid disk drives

Tang, Weilong and Temesvary, Viktoria and Miller, Raanan and Desai, Amish and Tai, Yu-Chong and Miu, Denny K. (1995) Silicon micromachined electromagnetic microactuators for rigid disk drives. IEEE Transactions on Magnetics, 31 (6). pp. 2964-2966. ISSN 0018-9464. doi:10.1109/20.490204.

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It is projected that by the year 2001, the disk drive industry will be shipping products with track density on the order of 25,000 tracks-per-inch, which would require a servo bandwidth of at least 3 kHz. This paper presents initial fabrication results of an industry and government supported research project at Caltech and UCLA to develop piggyback electromagnetically driven microactuators for such applications, which are fabricated using the state-of-the-art silicon micromachining techniques.

Item Type:Article
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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 1995 IEEE.
Issue or Number:6
Record Number:CaltechAUTHORS:20190320-154545293
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Official Citation:Weilong Tang, V. Temesvary, R. Miller, A. Desai, Yu-Chong Tai and D. K. Miu, "Silicon micromachined electromagnetic microactuators for rigid disk drives," in IEEE Transactions on Magnetics, vol. 31, no. 6, pp. 2964-2966, Nov. 1995. doi: 10.1109/20.490204
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94010
Deposited By: Tony Diaz
Deposited On:20 Mar 2019 22:51
Last Modified:16 Nov 2021 17:02

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