Silicon micromachined electromagnetic microactuators for rigid disk drives

Tang, Weilong and Temesvary, Viktoria and Miller, Raanan and Desai, Amish and Tai, Yu-Chong and Miu, Denny K. (1995) Silicon micromachined electromagnetic microactuators for rigid disk drives. IEEE Transactions on Magnetics, 31 (6). pp. 2964-2966. ISSN 0018-9464. doi:10.1109/20.490204. https://resolver.caltech.edu/CaltechAUTHORS:20190320-154545293

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Abstract

It is projected that by the year 2001, the disk drive industry will be shipping products with track density on the order of 25,000 tracks-per-inch, which would require a servo bandwidth of at least 3 kHz. This paper presents initial fabrication results of an industry and government supported research project at Caltech and UCLA to develop piggyback electromagnetically driven microactuators for such applications, which are fabricated using the state-of-the-art silicon micromachining techniques.

Item Type:

Article

Related URLs:

URL	URL Type	Description
https://doi.org/10.1109/20.490204	DOI	Article

ORCID:

Author	ORCID
Tai, Yu-Chong	0000-0001-8529-106X

Additional Information:

Issue or Number:

DOI:

10.1109/20.490204

Record Number:

CaltechAUTHORS:20190320-154545293

Persistent URL:

https://resolver.caltech.edu/CaltechAUTHORS:20190320-154545293

Official Citation:

Weilong Tang, V. Temesvary, R. Miller, A. Desai, Yu-Chong Tai and D. K. Miu, "Silicon micromachined electromagnetic microactuators for rigid disk drives," in IEEE Transactions on Magnetics, vol. 31, no. 6, pp. 2964-2966, Nov. 1995. doi: 10.1109/20.490204

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No commercial reproduction, distribution, display or performance rights in this work are provided.

ID Code:

94010

Collection:

CaltechAUTHORS

Deposited By:

Tony Diaz

Deposited On:

20 Mar 2019 22:51

Last Modified:

16 Nov 2021 17:02

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