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Polymer-based electrospray chips for mass spectrometry

Wang, Xuan-Qi and Desai, Amish and Tai, Yu-Chong and Licklider, Lawrence and Lee, Terry D. (1999) Polymer-based electrospray chips for mass spectrometry. In: Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 523-528. ISBN 0-7803-5194-0.

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In this paper, we present our development of a MEMS chip with an overhanging polymer microcapillary 2.5 mm in length and with a 5 µm x 10 µm orifice size at the tip. The fabricated chips have been successfully interfaced with a mass spectrometer (MS) to validate electrospray ionization (ESI) for biochemical analysis. The prediction of a reduction in Taylor cone size has also been observed with real time ESI fluid visualization from our chip. Built-in micro particle filters and centimeter long serpentine microchannels were fabricated on the chip with a low temperature process by using the Parylene polymer as a structural material, aluminum and photoresist as sacrificial layers, and bromine trifluoride (BrF_3) gas phase etching for final microcapillary releasing. The use of an overhanging polymer structure adds a new a level of mechanical robustness that was never achievable with other thin films. Functionality of our device was proven by consistent detection of myoglobin in a 200 nM solution at a flow rate of 35 nL/min and a voltage potential of 1.5 kV. This MS interface chip represents vital and significant improvements in MEMS process technology and MS functionality with respect to the silicon nitride (Si_xN_y) ESI nozzles previously reported.

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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 1999 IEEE. This project is funded by NIH grant 2 R01 RR06217-06 and by Cancer Center core grant P30 CA33752. The authors would also like to thank Mr. Trevor Roper for maintaining the equipment.
Funding AgencyGrant Number
NIH2 R01 RR06217-06
NIHP30 CA33752
Record Number:CaltechAUTHORS:20190320-155059492
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Official Citation:Xuan-Qi Wang, A. Desai, Yu-Chong Tai, L. Licklider and T. D. Lee, "Polymer-based electrospray chips for mass spectrometry," Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), Orlando, FL, USA, 1999, pp. 523-528. doi: 10.1109/MEMSYS.1999.746883
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94011
Deposited By: Tony Diaz
Deposited On:20 Mar 2019 23:08
Last Modified:16 Nov 2021 17:02

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