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Floating-disk parylene micro check valve

Chen, Po-Jui and Tai, Yu-Chong (2007) Floating-disk parylene micro check valve. In: 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE , Piscataway, NJ, pp. 453-456. ISBN 1-4244-0951-9.

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A novel micro check valve which has nearly ideal fluidic shunting behaviors is presented. Featuring a parylene-based floating disk, this surface-micromachined check valve ultimately realizes both zero forward cracking pressure and zero reverse leakage in fluidic operations. Two different floating disk designs have been implemented to demonstrate functionality of the microvalve. Experimental data of underwater testing successfully show that in-channel floating-disk valves in both designs have great fluidic performance close to an ideal check valve, except the additional fluidic resistance in the order of 10^(13) N-s/m^2 based on dimensions of the fabricated devices. Their pressure loading limit have been confirmed to be higher than 300 kPa without water leakage. This type of micro check valve is believed to have great use of flow control in integrated microfluidics and lab-on-a-chip applications.

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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2007 IEEE. This work was supported in part by the Engineering Research Centers Program of the National Science Foundation under NSF Award Number EEC-0310723. The authors especially thank Mr. Jason Shih for his valuable comments on flow measurements and analysis, and Mr. Trevor Roper for his fabrication assistance.
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Record Number:CaltechAUTHORS:20190322-120334329
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Official Citation:Po-Jui Chen and Yu-Chong Tai, "Floating-disk parylene micro check valve," 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), Hyogo, 2007, pp. 453-456. doi: 10.1109/MEMSYS.2007.4433069
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94053
Deposited By: George Porter
Deposited On:25 Mar 2019 19:40
Last Modified:16 Nov 2021 17:02

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