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Parylene coated silicon probes for neural prosthesis

Huang, Ray and Pang, Changlin and Tai, Yu-Chong and Emken, Jeremy and Üstün, Cevat and Andersen, Richard (2008) Parylene coated silicon probes for neural prosthesis. In: 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE , Piscataway, NJ, pp. 947-950. ISBN 9781424419074.

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Silicon neural prosthetic probes require reliable sensing electrodes able to access deep cortical structures without breakage. However, manufacturing limitations have prevented a strong and biocompatible silicon electrode array from reaching this goal. We here demonstrate the first high-density, parylene-coated silicon probe (1.2 cm long) with micro-fabricated electrodes that is able to be inserted in vivo without failure. This work also presents new experimental results for array shank deflection testing, lifetime soak testing as well as the in vitro electrical characterization of the gold and platinum micro-electrodes. These results allow us to optimize the geometry and treatment for both the silicon probe and the metal electrodes.

Item Type:Book Section
Related URLs:
URLURL TypeDescription
Tai, Yu-Chong0000-0001-8529-106X
Andersen, Richard0000-0002-7947-0472
Additional Information:© 2008 IEEE. This project was funded by the Defense Advanced Research Projects Agency (DARPA) (Award # 908165) and by National Institute of Health (NIH) moveable probe project (Award # R01EY015545). The authors would also like to thank Mr. Trevor Roper, other members of the Caltech Micromachining Laboratory and Andersen lab at Caltech for their advice and help.
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)908165
Subject Keywords:parylene cable; neural prosthesis; silicon probe
Record Number:CaltechAUTHORS:20190322-120334650
Persistent URL:
Official Citation:R. Huang, Changlin Pang, Yu-Chong Tai, Jeremy Emken, Cevat Ustun and Richard Andersen, "Parylene coated silicon probes for neural prosthesis," 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Sanya, 2008, pp. 947-950. doi: 10.1109/NEMS.2008.4484478
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94056
Deposited By: George Porter
Deposited On:25 Mar 2019 21:13
Last Modified:16 Nov 2021 17:02

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