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Flexible parylene-valved skin for adaptive flow control

Pornsin-Sirirak, Nick and Liger, Matthieu and Tai, Yu-Chong and Ho, Steve and Ho, Chih-Ming (2002) Flexible parylene-valved skin for adaptive flow control. In: Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 101-104. ISBN 0-7803-7185-2. https://resolver.caltech.edu/CaltechAUTHORS:20190326-094444521

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Abstract

This paper describes the first work of using wafer-sized flexible parylene-valved actuator skins (total thickness ~20 µm) for micro adaptive flow control. The check-valved actuator skins feature vent-through holes with tethered valve caps on the membrane to regulate pressure distribution across the skins. The skins were integrated onto MEMS wings and were tested in the low-speed wind tunnel for aerodynamic evaluation. The test results have shown very significant effects on the aerodynamic performances. Compare to the reference MEMS wings (no actuators), both the lift and thrust of the parylene check-valved wings were improved by more than 50%. This is the first experimental result to demonstrate that the application of MEMS actuator skins for flow control is very promising.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/MEMSYS.2002.984100DOIArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2002 IEEE. The authors would like to thank DARPA (DABT63-98-C-0005) and NSF ERC for their generous supports.
Funders:
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)DABT63-98-C-0005
NSFUNSPECIFIED
DOI:10.1109/MEMSYS.2002.984100
Record Number:CaltechAUTHORS:20190326-094444521
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190326-094444521
Official Citation:N. Pornsin-Sirirak, M. Liger, Yu-Chong Tai, S. Ho and Chih-Ming Ho, "Flexible parylene-valved skin for adaptive flow control," Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), Las Vegas, NV, USA, 2002, pp. 101-104. doi: 10.1109/MEMSYS.2002.984100
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94142
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:26 Mar 2019 17:02
Last Modified:16 Nov 2021 17:03

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