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Theoretical and experimental studies of micromachined hot-wire anemometers

Jiang, Fukang and Tai, Yu-Chong and Ho, Chih-Ming and Karan, Rainer and Garstenauer, Michael (1994) Theoretical and experimental studies of micromachined hot-wire anemometers. In: Proceedings of 1994 IEEE International Electron Devices Meeting. IEEE , Piscataway, NJ, pp. 139-142. ISBN 0-7803-2111-1. https://resolver.caltech.edu/CaltechAUTHORS:20190326-111103745

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Abstract

A new type of micromachined and batch-fabricated hot-wire anemometers has been developed. The systematic characterization of these devices, especially of the steady-state characteristics, frequency response, and directional dependence are presented. These micromachined anemometers can perform better than conventional ones because of their extremely small size. It is demonstrated that a 10 µm long, 1 µm wide, and 0.5 µm thick polysilicon hot wire can have a unprecedented bandwidth of 1.4 MHz in constant-temperature mode.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/IEDM.1994.383445DOIArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 1994 IEEE. This project is supported by AFOSR under grant F49620-92-J-0424. The authors would like to thank Trevor Roper for his help in processing.
Funders:
Funding AgencyGrant Number
Air Force Office of Scientific Research (AFOSR)F49620-92-J-0424
Record Number:CaltechAUTHORS:20190326-111103745
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190326-111103745
Official Citation:Fukang Jiang, Yu-Chong Tai, Chih-Ming Ho, R. Karan and M. Garstenauer, "Theoretical and experimental studies of micromachined hot-wire anemometers," Proceedings of 1994 IEEE International Electron Devices Meeting, San Francisco, CA, USA, 1994, pp. 139-142. doi: 10.1109/IEDM.1994.383445
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94145
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:26 Mar 2019 19:45
Last Modified:03 Oct 2019 21:01

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