Jiang, Fukang and Tai, Yu-Chong and Ho, Chih-Ming and Karan, Rainer and Garstenauer, Michael (1994) Theoretical and experimental studies of micromachined hot-wire anemometers. In: Proceedings of 1994 IEEE International Electron Devices Meeting. IEEE , Piscataway, NJ, pp. 139-142. ISBN 0-7803-2111-1. https://resolver.caltech.edu/CaltechAUTHORS:20190326-111103745
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Abstract
A new type of micromachined and batch-fabricated hot-wire anemometers has been developed. The systematic characterization of these devices, especially of the steady-state characteristics, frequency response, and directional dependence are presented. These micromachined anemometers can perform better than conventional ones because of their extremely small size. It is demonstrated that a 10 µm long, 1 µm wide, and 0.5 µm thick polysilicon hot wire can have a unprecedented bandwidth of 1.4 MHz in constant-temperature mode.
| Item Type: | Book Section | ||||||
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| Additional Information: | © 1994 IEEE. This project is supported by AFOSR under grant F49620-92-J-0424. The authors would like to thank Trevor Roper for his help in processing. | ||||||
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| Record Number: | CaltechAUTHORS:20190326-111103745 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20190326-111103745 | ||||||
| Official Citation: | Fukang Jiang, Yu-Chong Tai, Chih-Ming Ho, R. Karan and M. Garstenauer, "Theoretical and experimental studies of micromachined hot-wire anemometers," Proceedings of 1994 IEEE International Electron Devices Meeting, San Francisco, CA, USA, 1994, pp. 139-142. doi: 10.1109/IEDM.1994.383445 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 94145 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Tony Diaz | ||||||
| Deposited On: | 26 Mar 2019 19:45 | ||||||
| Last Modified: | 03 Oct 2019 21:01 |
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