Yang, Lung-Jieh and Lin, Wei-Zhi and Yao, Tze-Jung and Tai, Yu-Chong (2002) Photo-patternable gelatin as protection layers in surface micromachinings. In: Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 471-474. ISBN 0-7803-7185-2. https://resolver.caltech.edu/CaltechAUTHORS:20190326-111642883
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Abstract
This paper describes a newly developed low-temperature photo-patternable Gelatin technology that is useful to produce a thick (greater than 10 microns) Gelatin protecting and strengthening layer for weak MEMS micro-structures. Example demonstrated here is the Gelatin process integrated with the Parylene MEMS technology. What is reported here is the complete processing details and formulae that allow anyone to use Gelatin like photo-resist. We find that it is a chemical-resistant and mechanical-robust material for MEMS applications.
| Item Type: | Book Section | ||||||
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| Additional Information: | © 2002 IEEE. The authors appreciate the financial support of this work from the National Science Council, Taiwan ROC, with the project number of NSC-89-2217-E-032-001. The authors also want to thank the helps from Mr. Yong Xu and Mr. T.N. Pornsin-Sirirak of the Micromachining group, Caltech, USA. | ||||||
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| DOI: | 10.1109/MEMSYS.2002.984304 | ||||||
| Record Number: | CaltechAUTHORS:20190326-111642883 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20190326-111642883 | ||||||
| Official Citation: | Lung-Jieh Yang, Wei-Zhi Lin, Tze-Jung Yao and Yu-Chong Tai, "Photo-patternable gelatin as protection layers in surface micromachinings," Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), Las Vegas, NV, USA, 2002, pp. 471-474. doi: 10.1109/MEMSYS.2002.984304 | ||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 94146 | ||||||
| Collection: | CaltechAUTHORS | ||||||
| Deposited By: | Tony Diaz | ||||||
| Deposited On: | 26 Mar 2019 19:44 | ||||||
| Last Modified: | 16 Nov 2021 17:03 |
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