CaltechAUTHORS
  A Caltech Library Service

Photo-patternable gelatin as protection layers in surface micromachinings

Yang, Lung-Jieh and Lin, Wei-Zhi and Yao, Tze-Jung and Tai, Yu-Chong (2002) Photo-patternable gelatin as protection layers in surface micromachinings. In: Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 471-474. ISBN 0-7803-7185-2. https://resolver.caltech.edu/CaltechAUTHORS:20190326-111642883

[img] PDF - Published Version
See Usage Policy.

750kB

Use this Persistent URL to link to this item: https://resolver.caltech.edu/CaltechAUTHORS:20190326-111642883

Abstract

This paper describes a newly developed low-temperature photo-patternable Gelatin technology that is useful to produce a thick (greater than 10 microns) Gelatin protecting and strengthening layer for weak MEMS micro-structures. Example demonstrated here is the Gelatin process integrated with the Parylene MEMS technology. What is reported here is the complete processing details and formulae that allow anyone to use Gelatin like photo-resist. We find that it is a chemical-resistant and mechanical-robust material for MEMS applications.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/MEMSYS.2002.984304DOIArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2002 IEEE. The authors appreciate the financial support of this work from the National Science Council, Taiwan ROC, with the project number of NSC-89-2217-E-032-001. The authors also want to thank the helps from Mr. Yong Xu and Mr. T.N. Pornsin-Sirirak of the Micromachining group, Caltech, USA.
Funders:
Funding AgencyGrant Number
National Science Council (Taipei)NSC-89-2217-E-032-001
DOI:10.1109/MEMSYS.2002.984304
Record Number:CaltechAUTHORS:20190326-111642883
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190326-111642883
Official Citation:Lung-Jieh Yang, Wei-Zhi Lin, Tze-Jung Yao and Yu-Chong Tai, "Photo-patternable gelatin as protection layers in surface micromachinings," Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), Las Vegas, NV, USA, 2002, pp. 471-474. doi: 10.1109/MEMSYS.2002.984304
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94146
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:26 Mar 2019 19:44
Last Modified:16 Nov 2021 17:03

Repository Staff Only: item control page