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Mass flowmeter using a multi-sensor chip

Xu, Yong and Chiu, Chen-Wei and Jiang, Fukang and Lin, Qiao and Tai, Yu-Chong (2000) Mass flowmeter using a multi-sensor chip. In: Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 541-546. ISBN 0-7803-5273-4. https://resolver.caltech.edu/CaltechAUTHORS:20190403-111649333

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Abstract

We report here a novel mass flowmeter using a multisensor chip that includes a 1-D array of pressure, temperature and shear stress sensors. This shear stress sensor based flowmeter is capable of high sensitivity and wide measurement range. Our study also shows that the mass flowmeter using shear-stress sensors produces better resolution than that from pressure sensors in the laminar flow regime. Extensive tests have been carried out to evaluate the effects of overheat ratio, channel height and gas properties. We also find the V^2 ∝ τ^(1/3) law for conventional hot film sensors does not hold for our micromachined shear stress sensor.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/MEMSYS.2000.838575DOIArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2000 IEEE. This work is supported by JPL under account code 49-204-52000-0-3460. The authors would like to thank Shuyun Wu, Trevor Roper and Hung Bui for their help with the process, Xing Yang and Ellis Meng for their help with the paper.
Funders:
Funding AgencyGrant Number
JPL49-204-52000-0-3460
Record Number:CaltechAUTHORS:20190403-111649333
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190403-111649333
Official Citation:Yong Xu, Chen-Wei Chiu, Fukang Jiang, Qiao Lin and Yu-Chong Tai, "Mass flowmeter using a multi-sensor chip," Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), Miyazaki, Japan, 2000, pp. 541-546. doi: 10.1109/MEMSYS.2000.838575
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94406
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:03 Apr 2019 18:31
Last Modified:03 Oct 2019 21:03

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