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An air-to-liquid MEMS particle sampler

Desai, Amish and Lee, Sang-Wook and Tai, Yu-Chong (2000) An air-to-liquid MEMS particle sampler. In: Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 733-738. ISBN 0-7803-5273-4. https://resolver.caltech.edu/CaltechAUTHORS:20190403-140936950

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Abstract

In order to have a working bio-particle analysis system, a method of capturing the particles from the air into the liquid is required. Here, we report a complete MEMS system that includes an air-to-liquid MEMS interface (made of glass and PDMS) for airborne bioparticle (<10 /spl mu/m) analysis, and demonstrate its successful integration with our DEP (dielectrophoretic) particle transportation and active filter membrane technology. Two types of air-to-liquid interfaces were investigated. The first, consisted of a stationary meniscus with moving particles; and second, stationary particles with an oscillating liquid meniscus. Due to large interfacial forces required in penetrating the liquid meniscus, the first design performed inadequately. However, these roadblocks were eliminated in the second technique and demonstrated as a working system.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/MEMSYS.2000.838609DOIArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2000 IEEE. The funding for this project was provided by DARPA, MicroFlumes program under contract No. N66001-96-C-83632. The authors would like to thank Trevor Roper and Ellis Meng for their help.
Funders:
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)N66001-96-C-83632
Record Number:CaltechAUTHORS:20190403-140936950
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190403-140936950
Official Citation:A. Dessai, Sang-Wook Lee and Yu-Chong Tai, "An air-to-liquid MEMS particle sampler," Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), Miyazaki, Japan, 2000, pp. 733-738. doi: 10.1109/MEMSYS.2000.838609
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94415
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:03 Apr 2019 21:46
Last Modified:03 Oct 2019 21:03

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