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Dielectric charging effects on Parylene electrostatic actuators

Yao, Tze-Jung and Walsh, Ken and Tai, Yu-Chong (2002) Dielectric charging effects on Parylene electrostatic actuators. In: Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 614-617. ISBN 0-7803-7185-2. https://resolver.caltech.edu/CaltechAUTHORS:20190403-145135262

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Abstract

We report here the first characterization of dielectric charging effects on Parylene electrostatic actuators. High-resistivity Parylene in-between air gaps can cause undesirable charging effects due to air ionization when operating as electrostatic sensors/actuators at voltages as low as tens of volts. This undesirable effect can either lower the sensitivity of the sensor or increase the pull-in voltage of the actuator. It is further observed that Parylene actuators operating at high voltage could even show "bounce-back" and "pull-in voltage drift" problems. It is concluded that even for MEMS, attention must be paid to the operating voltages and the resistivity of the dielectrics.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/MEMSYS.2002.984346DOIArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2002 IEEE. This work is supported by Agilent Technologies and the NSF Center for Neuromorphic System Engineering (CNSE) at Caltech.
Funders:
Funding AgencyGrant Number
Agilent TechnologiesUNSPECIFIED
Center for Neuromorphic Systems Engineering, CaltechUNSPECIFIED
Subject Keywords:Parylene, electrostatic actuator, charging
DOI:10.1109/MEMSYS.2002.984346
Record Number:CaltechAUTHORS:20190403-145135262
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190403-145135262
Official Citation:Tze-Jung Yao, K. Walsh and Yu-Chong Tai, "Dielectric charging effects on Parylene electrostatic actuators," Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), Las Vegas, NV, USA, 2002, pp. 614-617. doi: 10.1109/MEMSYS.2002.984346
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94417
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:03 Apr 2019 22:20
Last Modified:16 Nov 2021 17:05

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