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Integrated chemical sensors based on carbon black and polymer films using a standard CMOS process and post-processing

Dickson, Jeffrey A. and Goodman, Rodney M. (2000) Integrated chemical sensors based on carbon black and polymer films using a standard CMOS process and post-processing. In: 2000 IEEE International Symposium on Circuits and Systems. Emerging Technologies for the 21st Century. Proceedings. Vol.4. IEEE , Piscataway, NJ, pp. 341-344. ISBN 0-7803-5482-6. https://resolver.caltech.edu/CaltechAUTHORS:20190409-134834363

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Abstract

We present an integrated chemical sensor array fabricated using a CMOS process followed by post-processing. The sensor presented in this paper incorporates 324 individually addressable sensing nodes. Post processing involves an electroless nickel and gold plating step to fabricate sensing contacts, and the deposition of a carbon black based polymer sensor material. The operation of the integrated sensor is confirmed. This sensor technology will allow the creation of large arrays of chemically diverse sensors.


Item Type:Book Section
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https://doi.org/10.1109/ISCAS.2000.858758DOIArticle
Additional Information:© 2000 IEEE. This work was supported by DARPA under DAAK6097K9503. The authors would like to thank Charles Grosjean for his assistance with the profilometery measurements, Tom Tsao and Phil Stapleton for their input on the plating procedure, and Nate Lewis, Erik Severin and Shawn Briglin for their assistance with the chemical sensors.
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Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)DAAK6097K9503
Record Number:CaltechAUTHORS:20190409-134834363
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190409-134834363
Official Citation:J. A. Dickson and R. M. Goodman, "Integrated chemical sensors based on carbon black and polymer films using a standard CMOS process and post-processing," 2000 IEEE International Symposium on Circuits and Systems. Emerging Technologies for the 21st Century. Proceedings (IEEE Cat No.00CH36353), Geneva, Switzerland, 2000, pp. 341-344 vol.4. doi: 10.1109/ISCAS.2000.858758
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94597
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:09 Apr 2019 21:23
Last Modified:03 Oct 2019 21:05

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