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Surface micromachined and integrated capacitive sensors for microfluidic applications

Shih, Jason and Xie, Jun and Tai, Yu-Chong (2003) Surface micromachined and integrated capacitive sensors for microfluidic applications. In: TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers. Vol.1. IEEE , Piscataway, NJ, pp. 388-391. ISBN 0-7803-7731-1. https://resolver.caltech.edu/CaltechAUTHORS:20190409-153447934

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Abstract

We have demonstrated an entire series of capacitive sensors using a multi-layer parylene/photoresist surface micromachining technology. The developed sensors are designed for total integration into parylene-based microfluidic systems for real-time system monitoring. Sensors have been demonstrated for the following applications: in-line pressure sensing (range: 0-35 kPa, resolution: 0.03 kPa); liquid front position and/or volumetric measurements (range: 0->50 pL, resolution: <5 pL); and dielectric measurements, which can be used to deduce fluid properties such as liquid composition. The reported sensor technology demonstrates versatility, high sensitivity, small footprints, and easy integration.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/SENSOR.2003.1215335DOIArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2003 IEEE. This work is supported in part by NSF ERC Center at Caltech (Grant No. EEC-9402726), NIH (Grant No. 5R01RR06217-10), and DARPA/MTO Bioflips Program.
Funders:
Funding AgencyGrant Number
NSFEEC-9402726
NIH5R01RR06217-10
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Record Number:CaltechAUTHORS:20190409-153447934
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190409-153447934
Official Citation:J. Shih, J. Xie and Yu-Chong Tai, "Surface micromachined and integrated capacitive sensors for microfluidic applications," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), Boston, MA, USA, 2003, pp. 388-391 vol.1. doi: 10.1109/SENSOR.2003.1215335
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:94607
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:09 Apr 2019 22:48
Last Modified:03 Oct 2019 21:05

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