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A surface-micromachined shear stress imager

Jiang, Fukang and Tai, Yu-Chong and Gupta, Bhusan and Goodman, Rodney and Tung, Steve and Huang, Jin-Biao and Ho, Chih-Ming (1996) A surface-micromachined shear stress imager. In: Proceedings of Ninth International Workshop on Micro Electromechanical Systems. IEEE , Piscataway, NJ, pp. 110-115. ISBN 0780329856.

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A new MEMS shear stress sensor imager has been developed and its capability of imaging surface shear stress distribution has been demonstrated. The imager consists of multi-rows of vacuum-insulated shear stress sensors with a 300 /spl mu/m pitch. This small spacing allows it to detect surface flow patterns that could not be directly measured before. The high frequency response (30 kHz) of the sensor under constant temperature bias mode also allows it to be used in high Reynolds number turbulent flow studies. The measurement results in a fully developed turbulent flow agree well with the numerical and experimental results previously published.

Item Type:Book Section
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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 1996 IEEE. This work is jointly supported by AFOSR and ARPA. The authors would like thank Mr. Trevor Roper for the help in processing and Dr. Chang Liu for the help in imager design.
Funding AgencyGrant Number
Air Force Office of Scientific Research (AFOSR)UNSPECIFIED
Advanced Research Projects Agency (ARPA)UNSPECIFIED
Record Number:CaltechAUTHORS:20190429-151824343
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Official Citation:Fukang Jiang et al., "A surface-micromachined shear stress imager," Proceedings of Ninth International Workshop on Micro Electromechanical Systems, San Diego, CA, USA, 1996, pp. 110-115. doi: 10.1109/MEMSYS.1996.493838
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:95082
Deposited By: George Porter
Deposited On:29 Apr 2019 22:38
Last Modified:16 Nov 2021 17:10

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