CaltechAUTHORS
  A Caltech Library Service

Surface micromachined magnetic actuators

Liu, Chang and Tsao, Tom and Tai, Yu-Chong and Ho, Chih-Ming (1994) Surface micromachined magnetic actuators. In: Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems. IEEE , Piscataway, NJ, pp. 57-62. ISBN 0780318331. https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824764

[img] PDF - Published Version
See Usage Policy.

1016Kb

Use this Persistent URL to link to this item: https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824764

Abstract

A surface micromachined micromagnetic actuator (also called a magnetic flap) as an integrated part of an active micro electromechanical fluid control system is described. The flaps are fabricated by surface micromachining technology and are capable of achieving large deflections (above 100 /spl mu/m) with magnetic forces in stationary air. Special microfabrication issues involved in fabricating magnetic flaps with large areas are discussed. Mechanical characterizations of the flaps, including the intrinsic stresses of thin film materials and frequency response, are presented. Thermal actuation is capable of producing large flap displacements and has been theoretically and experimentally studied.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/memsys.1994.555598DOIArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 1994 IEEE. The authors thank Mr. Trevor Roper of the Caltech Micromachining Laboratory for maintaining processing equipment. This project is supported by the University Research Initiative (URI), a DOD/AFOSR joint project.
Funders:
Funding AgencyGrant Number
Air Force Office of Scientific Research (AFOSR)UNSPECIFIED
Record Number:CaltechAUTHORS:20190429-151824764
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824764
Official Citation:Chang Liu, Tom Tsao, Yu-Chong Tai and Chih-Ming Ho, "Surface micromachined magnetic actuators," Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems, Oiso, Japan, 1994, pp. 57-62. doi: 10.1109/MEMSYS.1994.555598
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:95088
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:30 Apr 2019 13:54
Last Modified:03 Oct 2019 21:10

Repository Staff Only: item control page