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IC-processed electrostatic micro-motors

Fan, Long-Sheng and Tai, Yu-Chong and Muller, Richard S. (1988) IC-processed electrostatic micro-motors. In: Technical Digest., International Electron Devices Meeting. IEEE , Piscataway, NJ, pp. 666-669.

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The authors describe the design, fabrication, and operation of several micromotors that have been produced using integrated-circuit processing. Both rotors and stators for these motors, which are driven by electrostatic forces, are formed from 1.0-1.5- µm-thick polycrystalline silicon. The diameters of the rotors in the motors tested are between 60 and 120 mu m. Motors with several friction-reducing designs have been fabricated using phosphosilicate glass (PSG) as a sacrificial material and either one or three polysilicon depositions. Examples of stepping and three-phase synchronous drive micromotors are described. Typical drive voltages for present designs exceed 100 V. Manually switched motors have tested at speeds up to 12 r.p.m. Synchronous motors have been driven at speeds to 500 r.p.m.

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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 1988 IEEE. We thank Profs. DJ. Angelakos, R.M. White, and Paul T. Yang for valuable discussion, and K. Voros, R. Hamilton, D. Giandomenico and the staff of the Berkeley Microfabrication Laboratory for assistance in processing.
Record Number:CaltechAUTHORS:20190429-151824840
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Official Citation:Long-Sheng Fan, Yu-Chong Tai and R. S. Muller, "IC-processed electrostatic micro-motors," Technical Digest., International Electron Devices Meeting, San Francisco, CA, USA, 1988, pp. 666-669. doi: 10.1109/IEDM.1988.32901
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:95089
Deposited By: George Porter
Deposited On:30 Apr 2019 14:06
Last Modified:16 Nov 2021 17:10

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