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Silicon microstructures and microactuators for compact computer disk drives

Miu, Denny K. and Tai, Yu-Chong (1995) Silicon microstructures and microactuators for compact computer disk drives. In: Proceedings of 1995 American Control Conference - ACC'95. Vol.6. IEEE , Piscataway, NJ, pp. 4136-4140. ISBN 0780324455.

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Silicon micromachining techniques offer many exciting opportunities for fabricating both passive microstructures and active electromagnetic microactuators for significant form factor reduction and increase in recording density of future magnetic recording rigid disk drives. In this overview paper, the authors have presented some recent results and novel product concepts.

Item Type:Book Section
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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 1995 American Control Conference. The work presented here was conducted at the Caltech Micromachining Laboratory with support from the University of California MICRO program and matching funds from the Applied Magnetics, Hewlett-Packard, IBM, Magnacomp, Maxtor, Quantum, Read-Rite and Seagate Technology Corporations, and the National Storage Industry Consortium (NSIC). The results are the combined efforts of our many colleagues, Amish Desai, Wen Hsieh, Rsanan Miller, Weilong Tang, Viktoria Temesvary and Shuyun Wu.
Funding AgencyGrant Number
University of CaliforniaUNSPECIFIED
Applied MagneticsUNSPECIFIED
Hewlett-Packard CompanyUNSPECIFIED
Seagate TechnologyUNSPECIFIED
National Storage Industry ConsortiumUNSPECIFIED
Record Number:CaltechAUTHORS:20190429-151824998
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Official Citation:D. K. Miu and Yu-Chong Tai, "Silicon microstructures and microactuators for compact computer disk drives," Proceedings of 1995 American Control Conference - ACC'95, Seattle, WA, USA, 1995, pp. 4136-4140 vol.6. doi: 10.1109/ACC.1995.532710
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:95091
Deposited By: George Porter
Deposited On:29 Apr 2019 22:31
Last Modified:16 Nov 2021 17:10

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