Miu, Denny K. and Tai, Yu-Chong (1995) Silicon microstructures and microactuators for compact computer disk drives. In: Proceedings of 1995 American Control Conference - ACC'95. Vol.6. IEEE , Piscataway, NJ, pp. 4136-4140. ISBN 0780324455. https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824998
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Abstract
Silicon micromachining techniques offer many exciting opportunities for fabricating both passive microstructures and active electromagnetic microactuators for significant form factor reduction and increase in recording density of future magnetic recording rigid disk drives. In this overview paper, the authors have presented some recent results and novel product concepts.
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Additional Information: | © 1995 American Control Conference. The work presented here was conducted at the Caltech Micromachining Laboratory with support from the University of California MICRO program and matching funds from the Applied Magnetics, Hewlett-Packard, IBM, Magnacomp, Maxtor, Quantum, Read-Rite and Seagate Technology Corporations, and the National Storage Industry Consortium (NSIC). The results are the combined efforts of our many colleagues, Amish Desai, Wen Hsieh, Rsanan Miller, Weilong Tang, Viktoria Temesvary and Shuyun Wu. | ||||||||||||||||||||||
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DOI: | 10.1109/acc.1995.532710 | ||||||||||||||||||||||
Record Number: | CaltechAUTHORS:20190429-151824998 | ||||||||||||||||||||||
Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824998 | ||||||||||||||||||||||
Official Citation: | D. K. Miu and Yu-Chong Tai, "Silicon microstructures and microactuators for compact computer disk drives," Proceedings of 1995 American Control Conference - ACC'95, Seattle, WA, USA, 1995, pp. 4136-4140 vol.6. doi: 10.1109/ACC.1995.532710 | ||||||||||||||||||||||
Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||||||||||||||||
ID Code: | 95091 | ||||||||||||||||||||||
Collection: | CaltechAUTHORS | ||||||||||||||||||||||
Deposited By: | George Porter | ||||||||||||||||||||||
Deposited On: | 29 Apr 2019 22:31 | ||||||||||||||||||||||
Last Modified: | 16 Nov 2021 17:10 |
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