Silicon microstructures and microactuators for compact computer disk drives

Miu, Denny K. and Tai, Yu-Chong (1995) Silicon microstructures and microactuators for compact computer disk drives. In: Proceedings of 1995 American Control Conference - ACC'95. Vol.6. IEEE , Piscataway, NJ, pp. 4136-4140. ISBN 0780324455. https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824998

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Abstract

Silicon micromachining techniques offer many exciting opportunities for fabricating both passive microstructures and active electromagnetic microactuators for significant form factor reduction and increase in recording density of future magnetic recording rigid disk drives. In this overview paper, the authors have presented some recent results and novel product concepts.

Item Type:

Book Section

Related URLs:

URL	URL Type	Description
https://doi.org/10.1109/acc.1995.532710	DOI	Article
https://ieeexplore.ieee.org/document/532710	Publisher	Article

ORCID:

Author	ORCID
Tai, Yu-Chong	0000-0001-8529-106X

Additional Information:

© 1995 American Control Conference. The work presented here was conducted at the Caltech Micromachining Laboratory with support from the University of California MICRO program and matching funds from the Applied Magnetics, Hewlett-Packard, IBM, Magnacomp, Maxtor, Quantum, Read-Rite and Seagate Technology Corporations, and the National Storage Industry Consortium (NSIC). The results are the combined efforts of our many colleagues, Amish Desai, Wen Hsieh, Rsanan Miller, Weilong Tang, Viktoria Temesvary and Shuyun Wu.

Funders:

Funding Agency	Grant Number
University of California	UNSPECIFIED
Applied Magnetics	UNSPECIFIED
Hewlett-Packard Company	UNSPECIFIED
IBM	UNSPECIFIED
Magnacomp	UNSPECIFIED
Maxtor	UNSPECIFIED
Quantum	UNSPECIFIED
Read-Rite	UNSPECIFIED
Seagate Technology	UNSPECIFIED
National Storage Industry Consortium	UNSPECIFIED

DOI:

10.1109/acc.1995.532710

Record Number:

CaltechAUTHORS:20190429-151824998

Persistent URL:

https://resolver.caltech.edu/CaltechAUTHORS:20190429-151824998

Official Citation:

D. K. Miu and Yu-Chong Tai, "Silicon microstructures and microactuators for compact computer disk drives," Proceedings of 1995 American Control Conference - ACC'95, Seattle, WA, USA, 1995, pp. 4136-4140 vol.6. doi: 10.1109/ACC.1995.532710

Usage Policy:

No commercial reproduction, distribution, display or performance rights in this work are provided.

ID Code:

95091

Collection:

CaltechAUTHORS

Deposited By:

George Porter

Deposited On:

29 Apr 2019 22:31

Last Modified:

16 Nov 2021 17:10

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