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A normally closed in-channel micro check valve

Wang, Xuan-Qi and Tai, Yu-Chong (2000) A normally closed in-channel micro check valve. In: Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 68-73. ISBN 0780352734.

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We present here the first surface-micromachined, normally closed, in-channel, Parylene check valve. This device is fabricated monolithically on a silicon substrate using a five-layer Parylene process. The operating structure of the check valve is a circular sealing plate on top of a ring-shaped valve seat. The sealing plate is center-anchored on top of a chamber diaphragm that is vacuum-collapsed to the bottom of the chamber in order to achieve a normally closed position. A thin gold layer on the roughened valve seat surface is used to reduce stiction between the sealing plate and the valve seat. We have achieved an in-channel check valve with a cracking (opening) pressure of 20/spl sim/40 kPa under forward bias and no measurable leakage under reverse bias up to 270 kPa. Using this design, this valve performs well in two-phase microfluidic systems (i.e. microchannel flows containing gas, liquid, or gas/liquid mixture).

Item Type:Book Section
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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2000 IEEE. This project is funded by NIH grant 2 R01 RR06217-06. The authors would also like to thank Dr. Terry D. Lee from City of Hope Research Center for discussion and support.
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NIH2 R01 RR06217-06
Record Number:CaltechAUTHORS:20190501-154133802
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Official Citation:Xuan-Qi Wang and Yu-Chong Tai, "A normally closed in-channel micro check valve," Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), Miyazaki, Japan, 2000, pp. 68-73. doi: 10.1109/MEMSYS.2000.838492
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:95148
Deposited By: George Porter
Deposited On:02 May 2019 15:21
Last Modified:03 Oct 2019 21:10

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