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Anti-reflective sub-wavelength patterning of IR optics

Vandormael, D. and Habraken, S. and Loicq, J. and Lenaerts, C. and Mawet, D. (2006) Anti-reflective sub-wavelength patterning of IR optics. In: Electro-Optical and Infrared Systems: Technology and Applications III. Proceedings of SPIE. No.6395. Society of Photo-Optical Instrumentation Engineers (SPIE) , Bellingham, WA, Art. No. 63950L. ISBN 9780819464934. https://resolver.caltech.edu/CaltechAUTHORS:20190517-082622240

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Abstract

Thermal infrared (IR) lenses require efficient anti-reflection coating. Moth-eye (or egg-box) 2D subwavelength gratings have demonstrated their ability to reach a very high transmission for a wide wavelength and angular range. The use in thermal IR is simplified by the lower resolution for lithographic technology, compared to visible waveband. However, deeper structures must be engraved and lithography must be adapted to IR materials. In order to be cost-effective, the patterning must be produced by replication techniques, such as embossing. Our laboratory is now experimenting hot embossing of moth-eye patterns in chalcogenide substrates. In this paper, theoretical analysis, micro-lithographic technology and manufacturing processes are detailed.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1117/12.692449DOIArticle
ORCID:
AuthorORCID
Mawet, D.0000-0002-8895-4735
Alternate Title:Antireflective subwavelength patterning of IR optics
Additional Information:© 2006 Society of Photo-Optical Instrumentation Engineers (SPIE). CSL acknowledges the Walloon region for financial support through the Euclid/Europa program.
Funders:
Funding AgencyGrant Number
Euclid/Europa ProgramUNSPECIFIED
Subject Keywords:antireflective, infrared, moth-eye, replication
Series Name:Proceedings of SPIE
Issue or Number:6395
Record Number:CaltechAUTHORS:20190517-082622240
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20190517-082622240
Official Citation:D. Vandormael, S. Habraken, J. Loicq, C. Lenaerts, and D. Mawet "Anti-reflective sub-wavelength patterning of IR optics", Proc. SPIE 6395, Electro-Optical and Infrared Systems: Technology and Applications III, 63950L (5 October 2006); doi: 10.1117/12.692449; https://doi.org/10.1117/12.692449
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:95554
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:20 May 2019 19:33
Last Modified:03 Oct 2019 21:14

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