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Phase Modulation with Electrically Tunable Vanadium Dioxide Phase-Change Metasurfaces

Kim, Yonghwi and Wu, Pin Chieh and Sokhoyan, Ruzan and Mauser, Kelly and Glaudell, Rebecca and Kafaie Shirmanesh, Ghazaleh and Atwater, Harry A. (2019) Phase Modulation with Electrically Tunable Vanadium Dioxide Phase-Change Metasurfaces. Nano Letters, 19 (6). pp. 3961-3968. ISSN 1530-6984. doi:10.1021/acs.nanolett.9b01246.

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We report a dynamically tunable reflectarray metasurface that continuously modulates the phase of reflected light in the near-infrared wavelength range under active electrical control of the phase transition from semiconducting to semimetallic states. We integrate a vanadium dioxide (VO_2) active layer into the dielectric gap of antenna elements in a reflectarray metasurface, which undergoes an insulator-to-metal transition upon resistive heating of the metallic patch antenna. The induced phase transition in the VO_2 film strongly perturbs the magnetic dipole resonance supported by the metasurface. By carefully controlling the volume fractions of coexisting metallic and dielectric regions of the VO_2 film, we observe a continuous shift of the phase of the reflected light, with a maximal achievable phase shift as high as 250°. We also observe a reflectance modulation of 23.5% as well as a spectral shift of the resonance position by 175 nm. The metasurface phase modulation is fairly broadband, yielding large phase shifts at multiple operation wavelengths.

Item Type:Article
Related URLs:
URLURL TypeDescription
Wu, Pin Chieh0000-0002-5781-9696
Sokhoyan, Ruzan0000-0003-4599-6350
Kafaie Shirmanesh, Ghazaleh0000-0003-1666-3215
Atwater, Harry A.0000-0001-9435-0201
Additional Information:© 2019 American Chemical Society. Received: March 26, 2019; Revised: May 21, 2019; Published: May 28, 2019. This work was supported by Samsung Electronics (Y.K., P.C.W., R.S., G.K.S.), the Ministry of Science and Technology, Taiwan under Grant No. 106-2917-I-564-049 (P.C.W.), and the Office of Science, U.S. Department of Energy (DOE) Office of Science Grant No. DE-FG02-07ER46405 (K.A.M. and H.A.A.). The authors used facilities supported by the Kavli Nanoscience Institute (KNI). Y.K. acknowledges the support from the Kwanjeong Educational Foundation scholarship. Y.K. also thanks J. Wong for help with the heating stage setup and G. Rossman for assistance with the initial FTIR measurements. The authors declare no competing financial interest.
Group:Kavli Nanoscience Institute
Funding AgencyGrant Number
Samsung ElectronicsUNSPECIFIED
Ministry of Science and Technology (Taipei)106-2917-I-564-049
Department of Energy (DOE)DE-FG02-07ER46405
Kwanjeong Educational FoundationUNSPECIFIED
Subject Keywords:Metasurface, reflectarray, vanadium dioxide, phase modulation, near-infrared
Issue or Number:6
Record Number:CaltechAUTHORS:20190530-104152445
Persistent URL:
Official Citation:Phase Modulation with Electrically Tunable Vanadium Dioxide Phase-Change Metasurfaces. Yonghwi Kim, Pin Chieh Wu, Ruzan Sokhoyan, Kelly Mauser, Rebecca Glaudell, Ghazaleh Kafaie Shirmanesh, and Harry A. Atwater. Nano Letters 2019 19 (6), 3961-3968. DOI: 10.1021/acs.nanolett.9b01246
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:95960
Deposited By: Tony Diaz
Deposited On:30 May 2019 17:52
Last Modified:16 Nov 2021 17:17

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